7/11/2012	7:14:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2012	7:14:26 AM	Recipe started at 7:14 AM
7/11/2012	7:14:26 AM	Helium valve closed
7/11/2012	7:14:26 AM	H2 valve closed
7/11/2012	7:14:26 AM	BCl3 valve closed
7/11/2012	7:14:26 AM	PH3 valve closed
7/11/2012	7:14:26 AM	SiCl4 pre valve closed
7/11/2012	7:14:26 AM	SiCl4 post valve closed
7/11/2012	7:14:26 AM	Main Vac valve closed
7/11/2012	7:14:26 AM	Bypass valve closed
7/11/2012	7:14:26 AM	Bubbler valve closed
7/11/2012	7:14:26 AM	Helium MFC set to  0.000000
7/11/2012	7:14:26 AM	H2 MFC set to  0.000000
7/11/2012	7:14:26 AM	BCl3 MFC set to  0.000000
7/11/2012	7:14:26 AM	PH3 MFC set to  0.000000
7/11/2012	7:14:26 AM	SiCl4 MFC set to  0.000000
7/11/2012	7:14:26 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	7:14:26 AM	Tube furnace set to 0
7/11/2012	7:14:29 AM	H2 valve closed
7/11/2012	7:14:29 AM	BCl3 valve closed
7/11/2012	7:14:29 AM	PH3 valve closed
7/11/2012	7:14:29 AM	SiCl4 pre valve closed
7/11/2012	7:14:29 AM	SiCl4 post valve closed
7/11/2012	7:14:29 AM	Main Vac valve closed
7/11/2012	7:14:29 AM	Bypass valve closed
7/11/2012	7:14:29 AM	Bubbler valve closed
7/11/2012	7:14:29 AM	Helium valve opened
7/11/2012	7:14:29 AM	Helium MFC set to  500.000000
7/11/2012	7:14:29 AM	H2 MFC set to  0.000000
7/11/2012	7:14:29 AM	BCl3 MFC set to  0.000000
7/11/2012	7:14:29 AM	PH3 MFC set to  0.000000
7/11/2012	7:14:29 AM	SiCl4 MFC set to  0.000000
7/11/2012	7:14:29 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	7:14:29 AM	Tube furnace set to 0
7/11/2012	7:15:42 AM	Helium valve closed
7/11/2012	7:15:42 AM	H2 valve closed
7/11/2012	7:15:42 AM	BCl3 valve closed
7/11/2012	7:15:42 AM	PH3 valve closed
7/11/2012	7:15:42 AM	SiCl4 pre valve closed
7/11/2012	7:15:42 AM	SiCl4 post valve closed
7/11/2012	7:15:42 AM	Main Vac valve closed
7/11/2012	7:15:42 AM	Bypass valve closed
7/11/2012	7:15:42 AM	Bubbler valve closed
7/11/2012	7:15:42 AM	Helium MFC set to  0.000000
7/11/2012	7:15:42 AM	H2 MFC set to  0.000000
7/11/2012	7:15:42 AM	BCl3 MFC set to  0.000000
7/11/2012	7:15:42 AM	PH3 MFC set to  0.000000
7/11/2012	7:15:42 AM	SiCl4 MFC set to  0.000000
7/11/2012	7:15:42 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	7:15:42 AM	Tube furnace set to 0
7/11/2012	7:15:43 AM	Run finished at 7:15 AM
7/11/2012	7:15:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2012	7:17:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	7:17:38 AM	Recipe started at 7:17 AM
7/11/2012	7:17:38 AM	Helium valve closed
7/11/2012	7:17:38 AM	H2 valve closed
7/11/2012	7:17:38 AM	BCl3 valve closed
7/11/2012	7:17:38 AM	PH3 valve closed
7/11/2012	7:17:38 AM	SiCl4 pre valve closed
7/11/2012	7:17:38 AM	SiCl4 post valve closed
7/11/2012	7:17:38 AM	Main Vac valve closed
7/11/2012	7:17:38 AM	Bubbler valve closed
7/11/2012	7:17:38 AM	Bypass valve opened
7/11/2012	7:17:38 AM	Helium MFC set to  0.000000
7/11/2012	7:17:38 AM	H2 MFC set to  0.000000
7/11/2012	7:17:38 AM	BCl3 MFC set to  0.000000
7/11/2012	7:17:38 AM	PH3 MFC set to  0.000000
7/11/2012	7:17:39 AM	SiCl4 MFC set to  0.000000
7/11/2012	7:17:39 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	7:17:39 AM	Tube furnace set to 0
7/11/2012	7:18:47 AM	Helium valve closed
7/11/2012	7:18:47 AM	H2 valve closed
7/11/2012	7:18:47 AM	BCl3 valve closed
7/11/2012	7:18:47 AM	PH3 valve closed
7/11/2012	7:18:47 AM	SiCl4 pre valve closed
7/11/2012	7:18:47 AM	SiCl4 post valve closed
7/11/2012	7:18:47 AM	Main Vac valve closed
7/11/2012	7:18:47 AM	Bubbler valve closed
7/11/2012	7:18:47 AM	Bypass valve opened
7/11/2012	7:18:47 AM	Helium MFC set to  0.000000
7/11/2012	7:18:47 AM	H2 MFC set to  0.000000
7/11/2012	7:18:47 AM	BCl3 MFC set to  0.000000
7/11/2012	7:18:47 AM	PH3 MFC set to  0.000000
7/11/2012	7:18:47 AM	SiCl4 MFC set to  0.000000
7/11/2012	7:18:47 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	7:18:48 AM	Tube furnace set to 0
7/11/2012	7:19:48 AM	Helium valve closed
7/11/2012	7:19:48 AM	H2 valve closed
7/11/2012	7:19:48 AM	BCl3 valve closed
7/11/2012	7:19:48 AM	PH3 valve closed
7/11/2012	7:19:48 AM	SiCl4 pre valve closed
7/11/2012	7:19:48 AM	SiCl4 post valve closed
7/11/2012	7:19:48 AM	Bypass valve closed
7/11/2012	7:19:48 AM	Bubbler valve closed
7/11/2012	7:19:48 AM	Main Vac valve opened
7/11/2012	7:19:48 AM	Helium MFC set to  0.000000
7/11/2012	7:19:48 AM	H2 MFC set to  0.000000
7/11/2012	7:19:48 AM	BCl3 MFC set to  0.000000
7/11/2012	7:19:48 AM	PH3 MFC set to  0.000000
7/11/2012	7:19:48 AM	SiCl4 MFC set to  0.000000
7/11/2012	7:19:48 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	7:19:48 AM	Tube furnace set to 0
7/11/2012	7:19:49 AM	Run finished at 7:19 AM
7/11/2012	7:19:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	9:58:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2012	9:58:31 AM	Recipe started at 9:58 AM
7/11/2012	9:58:31 AM	Helium valve closed
7/11/2012	9:58:31 AM	H2 valve closed
7/11/2012	9:58:31 AM	BCl3 valve closed
7/11/2012	9:58:31 AM	PH3 valve closed
7/11/2012	9:58:31 AM	SiCl4 pre valve closed
7/11/2012	9:58:31 AM	SiCl4 post valve closed
7/11/2012	9:58:31 AM	Main Vac valve closed
7/11/2012	9:58:31 AM	Bypass valve closed
7/11/2012	9:58:31 AM	Bubbler valve closed
7/11/2012	9:58:31 AM	Helium MFC set to  0.000000
7/11/2012	9:58:31 AM	H2 MFC set to  0.000000
7/11/2012	9:58:31 AM	BCl3 MFC set to  0.000000
7/11/2012	9:58:31 AM	PH3 MFC set to  0.000000
7/11/2012	9:58:31 AM	SiCl4 MFC set to  0.000000
7/11/2012	9:58:31 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	9:58:31 AM	Tube furnace set to 0
7/11/2012	9:58:34 AM	H2 valve closed
7/11/2012	9:58:34 AM	BCl3 valve closed
7/11/2012	9:58:34 AM	PH3 valve closed
7/11/2012	9:58:34 AM	SiCl4 pre valve closed
7/11/2012	9:58:34 AM	SiCl4 post valve closed
7/11/2012	9:58:34 AM	Main Vac valve closed
7/11/2012	9:58:34 AM	Bypass valve closed
7/11/2012	9:58:34 AM	Bubbler valve closed
7/11/2012	9:58:34 AM	Helium valve opened
7/11/2012	9:58:34 AM	Helium MFC set to  500.000000
7/11/2012	9:58:34 AM	H2 MFC set to  0.000000
7/11/2012	9:58:34 AM	BCl3 MFC set to  0.000000
7/11/2012	9:58:34 AM	PH3 MFC set to  0.000000
7/11/2012	9:58:34 AM	SiCl4 MFC set to  0.000000
7/11/2012	9:58:34 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	9:58:34 AM	Tube furnace set to 0
7/11/2012	9:59:47 AM	Helium valve closed
7/11/2012	9:59:47 AM	H2 valve closed
7/11/2012	9:59:47 AM	BCl3 valve closed
7/11/2012	9:59:47 AM	PH3 valve closed
7/11/2012	9:59:47 AM	SiCl4 pre valve closed
7/11/2012	9:59:47 AM	SiCl4 post valve closed
7/11/2012	9:59:47 AM	Main Vac valve closed
7/11/2012	9:59:47 AM	Bypass valve closed
7/11/2012	9:59:47 AM	Bubbler valve closed
7/11/2012	9:59:47 AM	Helium MFC set to  0.000000
7/11/2012	9:59:47 AM	H2 MFC set to  0.000000
7/11/2012	9:59:47 AM	BCl3 MFC set to  0.000000
7/11/2012	9:59:47 AM	PH3 MFC set to  0.000000
7/11/2012	9:59:47 AM	SiCl4 MFC set to  0.000000
7/11/2012	9:59:47 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	9:59:47 AM	Tube furnace set to 0
7/11/2012	9:59:48 AM	Run finished at 9:59 AM
7/11/2012	9:59:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2012	10:01:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	10:01:53 AM	Recipe started at 10:01 AM
7/11/2012	10:01:53 AM	Helium valve closed
7/11/2012	10:01:53 AM	H2 valve closed
7/11/2012	10:01:53 AM	BCl3 valve closed
7/11/2012	10:01:53 AM	PH3 valve closed
7/11/2012	10:01:53 AM	SiCl4 pre valve closed
7/11/2012	10:01:53 AM	SiCl4 post valve closed
7/11/2012	10:01:53 AM	Main Vac valve closed
7/11/2012	10:01:53 AM	Bubbler valve closed
7/11/2012	10:01:53 AM	Bypass valve opened
7/11/2012	10:01:53 AM	Helium MFC set to  0.000000
7/11/2012	10:01:53 AM	H2 MFC set to  0.000000
7/11/2012	10:01:53 AM	BCl3 MFC set to  0.000000
7/11/2012	10:01:53 AM	PH3 MFC set to  0.000000
7/11/2012	10:01:53 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:01:53 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:01:53 AM	Tube furnace set to 0
7/11/2012	10:03:01 AM	Helium valve closed
7/11/2012	10:03:01 AM	H2 valve closed
7/11/2012	10:03:01 AM	BCl3 valve closed
7/11/2012	10:03:01 AM	PH3 valve closed
7/11/2012	10:03:01 AM	SiCl4 pre valve closed
7/11/2012	10:03:01 AM	SiCl4 post valve closed
7/11/2012	10:03:01 AM	Main Vac valve closed
7/11/2012	10:03:01 AM	Bubbler valve closed
7/11/2012	10:03:01 AM	Bypass valve opened
7/11/2012	10:03:01 AM	Helium MFC set to  0.000000
7/11/2012	10:03:01 AM	H2 MFC set to  0.000000
7/11/2012	10:03:01 AM	BCl3 MFC set to  0.000000
7/11/2012	10:03:01 AM	PH3 MFC set to  0.000000
7/11/2012	10:03:01 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:03:01 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:03:01 AM	Tube furnace set to 0
7/11/2012	10:03:37 AM	Helium valve closed
7/11/2012	10:03:37 AM	H2 valve closed
7/11/2012	10:03:37 AM	BCl3 valve closed
7/11/2012	10:03:37 AM	PH3 valve closed
7/11/2012	10:03:37 AM	SiCl4 pre valve closed
7/11/2012	10:03:37 AM	SiCl4 post valve closed
7/11/2012	10:03:37 AM	Bypass valve closed
7/11/2012	10:03:37 AM	Bubbler valve closed
7/11/2012	10:03:37 AM	Main Vac valve opened
7/11/2012	10:03:37 AM	Helium MFC set to  0.000000
7/11/2012	10:03:37 AM	H2 MFC set to  0.000000
7/11/2012	10:03:37 AM	BCl3 MFC set to  0.000000
7/11/2012	10:03:37 AM	PH3 MFC set to  0.000000
7/11/2012	10:03:37 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:03:37 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:03:37 AM	Tube furnace set to 0
7/11/2012	10:03:38 AM	Run finished at 10:03 AM
7/11/2012	10:03:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	10:03:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2012	10:03:58 AM	Recipe started at 10:03 AM
7/11/2012	10:03:58 AM	Helium valve closed
7/11/2012	10:03:58 AM	H2 valve closed
7/11/2012	10:03:58 AM	BCl3 valve closed
7/11/2012	10:03:58 AM	PH3 valve closed
7/11/2012	10:03:58 AM	SiCl4 pre valve closed
7/11/2012	10:03:58 AM	SiCl4 post valve closed
7/11/2012	10:03:58 AM	Main Vac valve closed
7/11/2012	10:03:58 AM	Bypass valve closed
7/11/2012	10:03:58 AM	Bubbler valve closed
7/11/2012	10:03:58 AM	Helium MFC set to  0.000000
7/11/2012	10:03:58 AM	H2 MFC set to  0.000000
7/11/2012	10:03:58 AM	BCl3 MFC set to  0.000000
7/11/2012	10:03:58 AM	PH3 MFC set to  0.000000
7/11/2012	10:03:58 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:03:58 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:03:58 AM	Tube furnace set to 0
7/11/2012	10:04:01 AM	H2 valve closed
7/11/2012	10:04:01 AM	BCl3 valve closed
7/11/2012	10:04:01 AM	PH3 valve closed
7/11/2012	10:04:01 AM	SiCl4 pre valve closed
7/11/2012	10:04:01 AM	SiCl4 post valve closed
7/11/2012	10:04:01 AM	Main Vac valve closed
7/11/2012	10:04:01 AM	Bypass valve closed
7/11/2012	10:04:01 AM	Bubbler valve closed
7/11/2012	10:04:01 AM	Helium valve opened
7/11/2012	10:04:01 AM	Helium MFC set to  500.000000
7/11/2012	10:04:01 AM	H2 MFC set to  0.000000
7/11/2012	10:04:01 AM	BCl3 MFC set to  0.000000
7/11/2012	10:04:01 AM	PH3 MFC set to  0.000000
7/11/2012	10:04:01 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:04:01 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:04:01 AM	Tube furnace set to 0
7/11/2012	10:05:15 AM	Helium valve closed
7/11/2012	10:05:15 AM	H2 valve closed
7/11/2012	10:05:15 AM	BCl3 valve closed
7/11/2012	10:05:15 AM	PH3 valve closed
7/11/2012	10:05:15 AM	SiCl4 pre valve closed
7/11/2012	10:05:15 AM	SiCl4 post valve closed
7/11/2012	10:05:15 AM	Main Vac valve closed
7/11/2012	10:05:15 AM	Bypass valve closed
7/11/2012	10:05:15 AM	Bubbler valve closed
7/11/2012	10:05:15 AM	Helium MFC set to  0.000000
7/11/2012	10:05:15 AM	H2 MFC set to  0.000000
7/11/2012	10:05:15 AM	BCl3 MFC set to  0.000000
7/11/2012	10:05:15 AM	PH3 MFC set to  0.000000
7/11/2012	10:05:15 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:05:15 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:05:15 AM	Tube furnace set to 0
7/11/2012	10:05:16 AM	Run finished at 10:05 AM
7/11/2012	10:05:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2012	10:07:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	10:07:59 AM	Recipe started at 10:07 AM
7/11/2012	10:07:59 AM	Helium valve closed
7/11/2012	10:07:59 AM	H2 valve closed
7/11/2012	10:07:59 AM	BCl3 valve closed
7/11/2012	10:07:59 AM	PH3 valve closed
7/11/2012	10:07:59 AM	SiCl4 pre valve closed
7/11/2012	10:07:59 AM	SiCl4 post valve closed
7/11/2012	10:07:59 AM	Main Vac valve closed
7/11/2012	10:07:59 AM	Bubbler valve closed
7/11/2012	10:07:59 AM	Bypass valve opened
7/11/2012	10:07:59 AM	Helium MFC set to  0.000000
7/11/2012	10:07:59 AM	H2 MFC set to  0.000000
7/11/2012	10:07:59 AM	BCl3 MFC set to  0.000000
7/11/2012	10:07:59 AM	PH3 MFC set to  0.000000
7/11/2012	10:07:59 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:07:59 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:07:59 AM	Tube furnace set to 0
7/11/2012	10:09:08 AM	Helium valve closed
7/11/2012	10:09:08 AM	H2 valve closed
7/11/2012	10:09:08 AM	BCl3 valve closed
7/11/2012	10:09:08 AM	PH3 valve closed
7/11/2012	10:09:08 AM	SiCl4 pre valve closed
7/11/2012	10:09:08 AM	SiCl4 post valve closed
7/11/2012	10:09:08 AM	Main Vac valve closed
7/11/2012	10:09:08 AM	Bubbler valve closed
7/11/2012	10:09:08 AM	Bypass valve opened
7/11/2012	10:09:08 AM	Helium MFC set to  0.000000
7/11/2012	10:09:08 AM	H2 MFC set to  0.000000
7/11/2012	10:09:08 AM	BCl3 MFC set to  0.000000
7/11/2012	10:09:08 AM	PH3 MFC set to  0.000000
7/11/2012	10:09:08 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:09:08 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:09:08 AM	Tube furnace set to 0
7/11/2012	10:10:09 AM	Helium valve closed
7/11/2012	10:10:09 AM	H2 valve closed
7/11/2012	10:10:09 AM	BCl3 valve closed
7/11/2012	10:10:09 AM	PH3 valve closed
7/11/2012	10:10:09 AM	SiCl4 pre valve closed
7/11/2012	10:10:09 AM	SiCl4 post valve closed
7/11/2012	10:10:09 AM	Bypass valve closed
7/11/2012	10:10:09 AM	Bubbler valve closed
7/11/2012	10:10:09 AM	Main Vac valve opened
7/11/2012	10:10:09 AM	Helium MFC set to  0.000000
7/11/2012	10:10:09 AM	H2 MFC set to  0.000000
7/11/2012	10:10:09 AM	BCl3 MFC set to  0.000000
7/11/2012	10:10:09 AM	PH3 MFC set to  0.000000
7/11/2012	10:10:09 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:10:09 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:10:09 AM	Tube furnace set to 0
7/11/2012	10:10:10 AM	Run finished at 10:10 AM
7/11/2012	10:10:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	10:34:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/11/2012	10:34:26 AM	Recipe started at 10:34 AM
7/11/2012	10:34:26 AM	Helium valve closed
7/11/2012	10:34:26 AM	H2 valve closed
7/11/2012	10:34:26 AM	BCl3 valve closed
7/11/2012	10:34:26 AM	PH3 valve closed
7/11/2012	10:34:26 AM	SiCl4 pre valve closed
7/11/2012	10:34:26 AM	SiCl4 post valve closed
7/11/2012	10:34:26 AM	Main Vac valve closed
7/11/2012	10:34:26 AM	Bubbler valve closed
7/11/2012	10:34:26 AM	Bypass valve opened
7/11/2012	10:34:26 AM	Helium MFC set to  0.000000
7/11/2012	10:34:26 AM	H2 MFC set to  0.000000
7/11/2012	10:34:26 AM	BCl3 MFC set to  0.000000
7/11/2012	10:34:26 AM	PH3 MFC set to  0.000000
7/11/2012	10:34:26 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:34:26 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:34:27 AM	Tube furnace set to 0
7/11/2012	10:34:27 AM	Helium valve closed
7/11/2012	10:34:27 AM	H2 valve closed
7/11/2012	10:34:27 AM	BCl3 valve closed
7/11/2012	10:34:27 AM	PH3 valve closed
7/11/2012	10:34:27 AM	SiCl4 pre valve closed
7/11/2012	10:34:27 AM	SiCl4 post valve closed
7/11/2012	10:34:27 AM	Main Vac valve closed
7/11/2012	10:34:27 AM	Bubbler valve closed
7/11/2012	10:34:27 AM	Bypass valve opened
7/11/2012	10:34:27 AM	Helium MFC set to  0.000000
7/11/2012	10:34:27 AM	H2 MFC set to  0.000000
7/11/2012	10:34:27 AM	BCl3 MFC set to  0.000000
7/11/2012	10:34:27 AM	PH3 MFC set to  0.000000
7/11/2012	10:34:27 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:34:27 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:34:27 AM	Tube furnace set to 0
7/11/2012	10:34:28 AM	Helium valve closed
7/11/2012	10:34:28 AM	H2 valve closed
7/11/2012	10:34:28 AM	BCl3 valve closed
7/11/2012	10:34:28 AM	PH3 valve closed
7/11/2012	10:34:28 AM	SiCl4 pre valve closed
7/11/2012	10:34:28 AM	SiCl4 post valve closed
7/11/2012	10:34:28 AM	Bypass valve closed
7/11/2012	10:34:28 AM	Bubbler valve closed
7/11/2012	10:34:28 AM	Main Vac valve opened
7/11/2012	10:34:28 AM	Helium MFC set to  0.000000
7/11/2012	10:34:28 AM	H2 MFC set to  0.000000
7/11/2012	10:34:28 AM	BCl3 MFC set to  0.000000
7/11/2012	10:34:28 AM	PH3 MFC set to  0.000000
7/11/2012	10:34:28 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:34:28 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:34:28 AM	Tube furnace set to 0
7/11/2012	10:34:29 AM	H2 valve closed
7/11/2012	10:34:29 AM	BCl3 valve closed
7/11/2012	10:34:29 AM	PH3 valve closed
7/11/2012	10:34:29 AM	SiCl4 pre valve closed
7/11/2012	10:34:29 AM	SiCl4 post valve closed
7/11/2012	10:34:29 AM	Bypass valve closed
7/11/2012	10:34:29 AM	Bubbler valve closed
7/11/2012	10:34:29 AM	Helium valve opened
7/11/2012	10:34:29 AM	Main Vac valve opened
7/11/2012	10:34:29 AM	Helium MFC set to  20.000000
7/11/2012	10:34:29 AM	H2 MFC set to  0.000000
7/11/2012	10:34:29 AM	BCl3 MFC set to  0.000000
7/11/2012	10:34:29 AM	PH3 MFC set to  0.000000
7/11/2012	10:34:29 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:34:29 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:34:29 AM	Tube furnace set to 0
7/11/2012	10:34:59 AM	Helium valve closed
7/11/2012	10:34:59 AM	H2 valve closed
7/11/2012	10:34:59 AM	BCl3 valve closed
7/11/2012	10:34:59 AM	PH3 valve closed
7/11/2012	10:34:59 AM	SiCl4 pre valve closed
7/11/2012	10:34:59 AM	SiCl4 post valve closed
7/11/2012	10:34:59 AM	Bypass valve closed
7/11/2012	10:34:59 AM	Bubbler valve closed
7/11/2012	10:34:59 AM	Main Vac valve opened
7/11/2012	10:34:59 AM	Helium MFC set to  0.000000
7/11/2012	10:34:59 AM	H2 MFC set to  0.000000
7/11/2012	10:34:59 AM	BCl3 MFC set to  0.000000
7/11/2012	10:34:59 AM	PH3 MFC set to  0.000000
7/11/2012	10:34:59 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:34:59 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:34:59 AM	Tube furnace set to 0
7/11/2012	10:35:29 AM	H2 valve closed
7/11/2012	10:35:29 AM	BCl3 valve closed
7/11/2012	10:35:29 AM	PH3 valve closed
7/11/2012	10:35:29 AM	SiCl4 pre valve closed
7/11/2012	10:35:29 AM	SiCl4 post valve closed
7/11/2012	10:35:29 AM	Bypass valve closed
7/11/2012	10:35:29 AM	Bubbler valve closed
7/11/2012	10:35:29 AM	Helium valve opened
7/11/2012	10:35:29 AM	Main Vac valve opened
7/11/2012	10:35:29 AM	Helium MFC set to  20.000000
7/11/2012	10:35:29 AM	H2 MFC set to  0.000000
7/11/2012	10:35:29 AM	BCl3 MFC set to  0.000000
7/11/2012	10:35:29 AM	PH3 MFC set to  0.000000
7/11/2012	10:35:29 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:35:29 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:35:29 AM	Tube furnace set to 0
7/11/2012	10:35:59 AM	Helium valve closed
7/11/2012	10:35:59 AM	H2 valve closed
7/11/2012	10:35:59 AM	BCl3 valve closed
7/11/2012	10:35:59 AM	PH3 valve closed
7/11/2012	10:35:59 AM	SiCl4 pre valve closed
7/11/2012	10:35:59 AM	SiCl4 post valve closed
7/11/2012	10:36:00 AM	Bypass valve closed
7/11/2012	10:36:00 AM	Bubbler valve closed
7/11/2012	10:36:00 AM	Main Vac valve opened
7/11/2012	10:36:00 AM	Helium MFC set to  0.000000
7/11/2012	10:36:00 AM	H2 MFC set to  0.000000
7/11/2012	10:36:00 AM	BCl3 MFC set to  0.000000
7/11/2012	10:36:00 AM	PH3 MFC set to  0.000000
7/11/2012	10:36:00 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:36:00 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:36:00 AM	Tube furnace set to 0
7/11/2012	10:36:30 AM	H2 valve closed
7/11/2012	10:36:30 AM	BCl3 valve closed
7/11/2012	10:36:30 AM	PH3 valve closed
7/11/2012	10:36:30 AM	SiCl4 pre valve closed
7/11/2012	10:36:30 AM	SiCl4 post valve closed
7/11/2012	10:36:30 AM	Bypass valve closed
7/11/2012	10:36:30 AM	Bubbler valve closed
7/11/2012	10:36:30 AM	Helium valve opened
7/11/2012	10:36:30 AM	Main Vac valve opened
7/11/2012	10:36:30 AM	Helium MFC set to  20.000000
7/11/2012	10:36:30 AM	H2 MFC set to  0.000000
7/11/2012	10:36:30 AM	BCl3 MFC set to  0.000000
7/11/2012	10:36:30 AM	PH3 MFC set to  0.000000
7/11/2012	10:36:30 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:36:30 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:36:30 AM	Tube furnace set to 0
7/11/2012	10:37:00 AM	Helium valve closed
7/11/2012	10:37:00 AM	H2 valve closed
7/11/2012	10:37:00 AM	BCl3 valve closed
7/11/2012	10:37:00 AM	PH3 valve closed
7/11/2012	10:37:00 AM	SiCl4 pre valve closed
7/11/2012	10:37:00 AM	SiCl4 post valve closed
7/11/2012	10:37:00 AM	Bypass valve closed
7/11/2012	10:37:00 AM	Bubbler valve closed
7/11/2012	10:37:00 AM	Main Vac valve opened
7/11/2012	10:37:00 AM	Helium MFC set to  0.000000
7/11/2012	10:37:00 AM	H2 MFC set to  0.000000
7/11/2012	10:37:00 AM	BCl3 MFC set to  0.000000
7/11/2012	10:37:00 AM	PH3 MFC set to  0.000000
7/11/2012	10:37:00 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:37:00 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:37:00 AM	Tube furnace set to 0
7/11/2012	10:37:30 AM	H2 valve closed
7/11/2012	10:37:30 AM	BCl3 valve closed
7/11/2012	10:37:30 AM	PH3 valve closed
7/11/2012	10:37:30 AM	SiCl4 pre valve closed
7/11/2012	10:37:30 AM	SiCl4 post valve closed
7/11/2012	10:37:30 AM	Bypass valve closed
7/11/2012	10:37:30 AM	Bubbler valve closed
7/11/2012	10:37:30 AM	Helium valve opened
7/11/2012	10:37:30 AM	Main Vac valve opened
7/11/2012	10:37:30 AM	Helium MFC set to  20.000000
7/11/2012	10:37:30 AM	H2 MFC set to  0.000000
7/11/2012	10:37:30 AM	BCl3 MFC set to  0.000000
7/11/2012	10:37:30 AM	PH3 MFC set to  0.000000
7/11/2012	10:37:30 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:37:30 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:37:30 AM	Tube furnace set to 0
7/11/2012	10:38:00 AM	Helium valve closed
7/11/2012	10:38:00 AM	H2 valve closed
7/11/2012	10:38:00 AM	BCl3 valve closed
7/11/2012	10:38:00 AM	PH3 valve closed
7/11/2012	10:38:00 AM	SiCl4 pre valve closed
7/11/2012	10:38:00 AM	SiCl4 post valve closed
7/11/2012	10:38:00 AM	Bypass valve closed
7/11/2012	10:38:00 AM	Bubbler valve closed
7/11/2012	10:38:00 AM	Main Vac valve opened
7/11/2012	10:38:00 AM	Helium MFC set to  0.000000
7/11/2012	10:38:00 AM	H2 MFC set to  0.000000
7/11/2012	10:38:00 AM	BCl3 MFC set to  0.000000
7/11/2012	10:38:00 AM	PH3 MFC set to  0.000000
7/11/2012	10:38:00 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:38:00 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:38:01 AM	Tube furnace set to 0
7/11/2012	10:38:31 AM	H2 valve closed
7/11/2012	10:38:31 AM	BCl3 valve closed
7/11/2012	10:38:31 AM	PH3 valve closed
7/11/2012	10:38:31 AM	SiCl4 pre valve closed
7/11/2012	10:38:31 AM	SiCl4 post valve closed
7/11/2012	10:38:31 AM	Bypass valve closed
7/11/2012	10:38:31 AM	Bubbler valve closed
7/11/2012	10:38:31 AM	Helium valve opened
7/11/2012	10:38:31 AM	Main Vac valve opened
7/11/2012	10:38:31 AM	Helium MFC set to  20.000000
7/11/2012	10:38:31 AM	H2 MFC set to  0.000000
7/11/2012	10:38:31 AM	BCl3 MFC set to  0.000000
7/11/2012	10:38:31 AM	PH3 MFC set to  0.000000
7/11/2012	10:38:31 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:38:31 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:38:31 AM	Tube furnace set to 0
7/11/2012	10:39:01 AM	Helium valve closed
7/11/2012	10:39:01 AM	H2 valve closed
7/11/2012	10:39:01 AM	BCl3 valve closed
7/11/2012	10:39:01 AM	PH3 valve closed
7/11/2012	10:39:01 AM	SiCl4 pre valve closed
7/11/2012	10:39:01 AM	SiCl4 post valve closed
7/11/2012	10:39:01 AM	Bypass valve closed
7/11/2012	10:39:01 AM	Bubbler valve closed
7/11/2012	10:39:01 AM	Main Vac valve opened
7/11/2012	10:39:01 AM	Helium MFC set to  0.000000
7/11/2012	10:39:01 AM	H2 MFC set to  0.000000
7/11/2012	10:39:01 AM	BCl3 MFC set to  0.000000
7/11/2012	10:39:01 AM	PH3 MFC set to  0.000000
7/11/2012	10:39:01 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:39:01 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:39:01 AM	Tube furnace set to 0
7/11/2012	10:39:31 AM	H2 valve closed
7/11/2012	10:39:31 AM	BCl3 valve closed
7/11/2012	10:39:31 AM	PH3 valve closed
7/11/2012	10:39:31 AM	SiCl4 pre valve closed
7/11/2012	10:39:31 AM	SiCl4 post valve closed
7/11/2012	10:39:31 AM	Bypass valve closed
7/11/2012	10:39:31 AM	Bubbler valve closed
7/11/2012	10:39:31 AM	Helium valve opened
7/11/2012	10:39:31 AM	Main Vac valve opened
7/11/2012	10:39:31 AM	Helium MFC set to  20.000000
7/11/2012	10:39:31 AM	H2 MFC set to  0.000000
7/11/2012	10:39:31 AM	BCl3 MFC set to  0.000000
7/11/2012	10:39:31 AM	PH3 MFC set to  0.000000
7/11/2012	10:39:31 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:39:31 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:39:31 AM	Tube furnace set to 0
7/11/2012	10:40:01 AM	Helium valve closed
7/11/2012	10:40:01 AM	H2 valve closed
7/11/2012	10:40:01 AM	BCl3 valve closed
7/11/2012	10:40:01 AM	PH3 valve closed
7/11/2012	10:40:01 AM	SiCl4 pre valve closed
7/11/2012	10:40:01 AM	SiCl4 post valve closed
7/11/2012	10:40:01 AM	Bypass valve closed
7/11/2012	10:40:01 AM	Bubbler valve closed
7/11/2012	10:40:01 AM	Main Vac valve opened
7/11/2012	10:40:01 AM	Helium MFC set to  0.000000
7/11/2012	10:40:01 AM	H2 MFC set to  0.000000
7/11/2012	10:40:01 AM	BCl3 MFC set to  0.000000
7/11/2012	10:40:01 AM	PH3 MFC set to  0.000000
7/11/2012	10:40:01 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:40:01 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:40:02 AM	Tube furnace set to 0
7/11/2012	10:40:32 AM	H2 valve closed
7/11/2012	10:40:32 AM	BCl3 valve closed
7/11/2012	10:40:32 AM	PH3 valve closed
7/11/2012	10:40:32 AM	SiCl4 pre valve closed
7/11/2012	10:40:32 AM	SiCl4 post valve closed
7/11/2012	10:40:32 AM	Bypass valve closed
7/11/2012	10:40:32 AM	Bubbler valve closed
7/11/2012	10:40:32 AM	Helium valve opened
7/11/2012	10:40:32 AM	Main Vac valve opened
7/11/2012	10:40:32 AM	Helium MFC set to  20.000000
7/11/2012	10:40:32 AM	H2 MFC set to  0.000000
7/11/2012	10:40:32 AM	BCl3 MFC set to  0.000000
7/11/2012	10:40:32 AM	PH3 MFC set to  0.000000
7/11/2012	10:40:32 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:40:32 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:40:32 AM	Tube furnace set to 0
7/11/2012	10:41:02 AM	Helium valve closed
7/11/2012	10:41:02 AM	H2 valve closed
7/11/2012	10:41:02 AM	BCl3 valve closed
7/11/2012	10:41:02 AM	PH3 valve closed
7/11/2012	10:41:02 AM	SiCl4 pre valve closed
7/11/2012	10:41:02 AM	SiCl4 post valve closed
7/11/2012	10:41:02 AM	Bypass valve closed
7/11/2012	10:41:02 AM	Bubbler valve closed
7/11/2012	10:41:02 AM	Main Vac valve opened
7/11/2012	10:41:02 AM	Helium MFC set to  0.000000
7/11/2012	10:41:02 AM	H2 MFC set to  0.000000
7/11/2012	10:41:02 AM	BCl3 MFC set to  0.000000
7/11/2012	10:41:02 AM	PH3 MFC set to  0.000000
7/11/2012	10:41:02 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:41:02 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:41:02 AM	Tube furnace set to 0
7/11/2012	10:41:32 AM	H2 valve closed
7/11/2012	10:41:32 AM	BCl3 valve closed
7/11/2012	10:41:32 AM	PH3 valve closed
7/11/2012	10:41:32 AM	SiCl4 pre valve closed
7/11/2012	10:41:32 AM	SiCl4 post valve closed
7/11/2012	10:41:32 AM	Bypass valve closed
7/11/2012	10:41:32 AM	Bubbler valve closed
7/11/2012	10:41:32 AM	Helium valve opened
7/11/2012	10:41:32 AM	Main Vac valve opened
7/11/2012	10:41:32 AM	Helium MFC set to  20.000000
7/11/2012	10:41:32 AM	H2 MFC set to  0.000000
7/11/2012	10:41:32 AM	BCl3 MFC set to  0.000000
7/11/2012	10:41:32 AM	PH3 MFC set to  0.000000
7/11/2012	10:41:32 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:41:32 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:41:32 AM	Tube furnace set to 0
7/11/2012	10:42:02 AM	Helium valve closed
7/11/2012	10:42:02 AM	H2 valve closed
7/11/2012	10:42:02 AM	BCl3 valve closed
7/11/2012	10:42:02 AM	PH3 valve closed
7/11/2012	10:42:02 AM	SiCl4 pre valve closed
7/11/2012	10:42:02 AM	SiCl4 post valve closed
7/11/2012	10:42:02 AM	Bypass valve closed
7/11/2012	10:42:02 AM	Bubbler valve closed
7/11/2012	10:42:02 AM	Main Vac valve opened
7/11/2012	10:42:02 AM	Helium MFC set to  0.000000
7/11/2012	10:42:02 AM	H2 MFC set to  0.000000
7/11/2012	10:42:02 AM	BCl3 MFC set to  0.000000
7/11/2012	10:42:02 AM	PH3 MFC set to  0.000000
7/11/2012	10:42:02 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:42:02 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:42:03 AM	Tube furnace set to 0
7/11/2012	10:42:33 AM	H2 valve closed
7/11/2012	10:42:33 AM	BCl3 valve closed
7/11/2012	10:42:33 AM	PH3 valve closed
7/11/2012	10:42:33 AM	SiCl4 pre valve closed
7/11/2012	10:42:33 AM	SiCl4 post valve closed
7/11/2012	10:42:33 AM	Bypass valve closed
7/11/2012	10:42:33 AM	Bubbler valve closed
7/11/2012	10:42:33 AM	Helium valve opened
7/11/2012	10:42:33 AM	Main Vac valve opened
7/11/2012	10:42:33 AM	Helium MFC set to  20.000000
7/11/2012	10:42:33 AM	H2 MFC set to  0.000000
7/11/2012	10:42:33 AM	BCl3 MFC set to  0.000000
7/11/2012	10:42:33 AM	PH3 MFC set to  0.000000
7/11/2012	10:42:33 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:42:33 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:42:33 AM	Tube furnace set to 0
7/11/2012	10:43:03 AM	Helium valve closed
7/11/2012	10:43:03 AM	H2 valve closed
7/11/2012	10:43:03 AM	BCl3 valve closed
7/11/2012	10:43:03 AM	PH3 valve closed
7/11/2012	10:43:03 AM	SiCl4 pre valve closed
7/11/2012	10:43:03 AM	SiCl4 post valve closed
7/11/2012	10:43:03 AM	Bypass valve closed
7/11/2012	10:43:03 AM	Bubbler valve closed
7/11/2012	10:43:03 AM	Main Vac valve opened
7/11/2012	10:43:03 AM	Helium MFC set to  0.000000
7/11/2012	10:43:03 AM	H2 MFC set to  0.000000
7/11/2012	10:43:03 AM	BCl3 MFC set to  0.000000
7/11/2012	10:43:03 AM	PH3 MFC set to  0.000000
7/11/2012	10:43:03 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:43:03 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:43:03 AM	Tube furnace set to 0
7/11/2012	10:43:33 AM	H2 valve closed
7/11/2012	10:43:33 AM	BCl3 valve closed
7/11/2012	10:43:33 AM	PH3 valve closed
7/11/2012	10:43:33 AM	SiCl4 pre valve closed
7/11/2012	10:43:33 AM	SiCl4 post valve closed
7/11/2012	10:43:33 AM	Bypass valve closed
7/11/2012	10:43:33 AM	Bubbler valve closed
7/11/2012	10:43:33 AM	Helium valve opened
7/11/2012	10:43:33 AM	Main Vac valve opened
7/11/2012	10:43:33 AM	Helium MFC set to  20.000000
7/11/2012	10:43:33 AM	H2 MFC set to  0.000000
7/11/2012	10:43:33 AM	BCl3 MFC set to  0.000000
7/11/2012	10:43:33 AM	PH3 MFC set to  0.000000
7/11/2012	10:43:33 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:43:33 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:43:33 AM	Tube furnace set to 0
7/11/2012	10:44:03 AM	Helium valve closed
7/11/2012	10:44:03 AM	H2 valve closed
7/11/2012	10:44:03 AM	BCl3 valve closed
7/11/2012	10:44:03 AM	PH3 valve closed
7/11/2012	10:44:03 AM	SiCl4 pre valve closed
7/11/2012	10:44:03 AM	SiCl4 post valve closed
7/11/2012	10:44:03 AM	Bypass valve closed
7/11/2012	10:44:03 AM	Bubbler valve closed
7/11/2012	10:44:03 AM	Main Vac valve opened
7/11/2012	10:44:03 AM	Helium MFC set to  0.000000
7/11/2012	10:44:03 AM	H2 MFC set to  0.000000
7/11/2012	10:44:03 AM	BCl3 MFC set to  0.000000
7/11/2012	10:44:03 AM	PH3 MFC set to  0.000000
7/11/2012	10:44:03 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:44:03 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:44:03 AM	Tube furnace set to 0
7/11/2012	10:44:04 AM	Run finished at 10:44 AM
7/11/2012	10:44:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/11/2012	10:45:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/11/2012	10:45:27 AM	Recipe started at 10:45 AM
7/11/2012	10:45:28 AM	Helium valve closed
7/11/2012	10:45:28 AM	H2 valve closed
7/11/2012	10:45:28 AM	BCl3 valve closed
7/11/2012	10:45:28 AM	PH3 valve closed
7/11/2012	10:45:28 AM	SiCl4 pre valve closed
7/11/2012	10:45:28 AM	SiCl4 post valve closed
7/11/2012	10:45:28 AM	Main Vac valve closed
7/11/2012	10:45:28 AM	Bubbler valve closed
7/11/2012	10:45:28 AM	Bypass valve opened
7/11/2012	10:45:28 AM	Helium MFC set to  0.000000
7/11/2012	10:45:28 AM	H2 MFC set to  0.000000
7/11/2012	10:45:28 AM	BCl3 MFC set to  0.000000
7/11/2012	10:45:28 AM	PH3 MFC set to  0.000000
7/11/2012	10:45:28 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:45:28 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:45:28 AM	Tube furnace set to 0
7/11/2012	10:45:28 AM	Helium valve closed
7/11/2012	10:45:28 AM	H2 valve closed
7/11/2012	10:45:28 AM	BCl3 valve closed
7/11/2012	10:45:28 AM	PH3 valve closed
7/11/2012	10:45:28 AM	SiCl4 pre valve closed
7/11/2012	10:45:28 AM	SiCl4 post valve closed
7/11/2012	10:45:28 AM	Main Vac valve closed
7/11/2012	10:45:28 AM	Bubbler valve closed
7/11/2012	10:45:28 AM	Bypass valve opened
7/11/2012	10:45:28 AM	Helium MFC set to  0.000000
7/11/2012	10:45:28 AM	H2 MFC set to  0.000000
7/11/2012	10:45:28 AM	BCl3 MFC set to  0.000000
7/11/2012	10:45:28 AM	PH3 MFC set to  0.000000
7/11/2012	10:45:28 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:45:28 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:45:28 AM	Tube furnace set to 0
7/11/2012	10:45:29 AM	Helium valve closed
7/11/2012	10:45:29 AM	H2 valve closed
7/11/2012	10:45:29 AM	BCl3 valve closed
7/11/2012	10:45:29 AM	PH3 valve closed
7/11/2012	10:45:29 AM	SiCl4 pre valve closed
7/11/2012	10:45:29 AM	SiCl4 post valve closed
7/11/2012	10:45:29 AM	Bypass valve closed
7/11/2012	10:45:29 AM	Bubbler valve closed
7/11/2012	10:45:29 AM	Main Vac valve opened
7/11/2012	10:45:29 AM	Helium MFC set to  0.000000
7/11/2012	10:45:29 AM	H2 MFC set to  0.000000
7/11/2012	10:45:29 AM	BCl3 MFC set to  0.000000
7/11/2012	10:45:29 AM	PH3 MFC set to  0.000000
7/11/2012	10:45:29 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:45:29 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:45:29 AM	Tube furnace set to 0
7/11/2012	10:45:29 AM	H2 valve closed
7/11/2012	10:45:29 AM	BCl3 valve closed
7/11/2012	10:45:29 AM	PH3 valve closed
7/11/2012	10:45:29 AM	SiCl4 pre valve closed
7/11/2012	10:45:29 AM	SiCl4 post valve closed
7/11/2012	10:45:30 AM	Bypass valve closed
7/11/2012	10:45:30 AM	Bubbler valve closed
7/11/2012	10:45:30 AM	Helium valve opened
7/11/2012	10:45:30 AM	Main Vac valve opened
7/11/2012	10:45:30 AM	Helium MFC set to  20.000000
7/11/2012	10:45:30 AM	H2 MFC set to  0.000000
7/11/2012	10:45:30 AM	BCl3 MFC set to  0.000000
7/11/2012	10:45:30 AM	PH3 MFC set to  0.000000
7/11/2012	10:45:30 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:45:30 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:45:30 AM	Tube furnace set to 0
7/11/2012	10:46:00 AM	Helium valve closed
7/11/2012	10:46:00 AM	H2 valve closed
7/11/2012	10:46:00 AM	BCl3 valve closed
7/11/2012	10:46:00 AM	PH3 valve closed
7/11/2012	10:46:00 AM	SiCl4 pre valve closed
7/11/2012	10:46:00 AM	SiCl4 post valve closed
7/11/2012	10:46:00 AM	Bypass valve closed
7/11/2012	10:46:00 AM	Bubbler valve closed
7/11/2012	10:46:00 AM	Main Vac valve opened
7/11/2012	10:46:00 AM	Helium MFC set to  0.000000
7/11/2012	10:46:00 AM	H2 MFC set to  0.000000
7/11/2012	10:46:00 AM	BCl3 MFC set to  0.000000
7/11/2012	10:46:00 AM	PH3 MFC set to  0.000000
7/11/2012	10:46:00 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:46:00 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:46:00 AM	Tube furnace set to 0
7/11/2012	10:46:30 AM	H2 valve closed
7/11/2012	10:46:30 AM	BCl3 valve closed
7/11/2012	10:46:30 AM	PH3 valve closed
7/11/2012	10:46:30 AM	SiCl4 pre valve closed
7/11/2012	10:46:30 AM	SiCl4 post valve closed
7/11/2012	10:46:30 AM	Bypass valve closed
7/11/2012	10:46:30 AM	Bubbler valve closed
7/11/2012	10:46:30 AM	Helium valve opened
7/11/2012	10:46:30 AM	Main Vac valve opened
7/11/2012	10:46:30 AM	Helium MFC set to  20.000000
7/11/2012	10:46:30 AM	H2 MFC set to  0.000000
7/11/2012	10:46:30 AM	BCl3 MFC set to  0.000000
7/11/2012	10:46:30 AM	PH3 MFC set to  0.000000
7/11/2012	10:46:30 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:46:30 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:46:30 AM	Tube furnace set to 0
7/11/2012	10:47:00 AM	Helium valve closed
7/11/2012	10:47:00 AM	H2 valve closed
7/11/2012	10:47:00 AM	BCl3 valve closed
7/11/2012	10:47:00 AM	PH3 valve closed
7/11/2012	10:47:00 AM	SiCl4 pre valve closed
7/11/2012	10:47:00 AM	SiCl4 post valve closed
7/11/2012	10:47:00 AM	Bypass valve closed
7/11/2012	10:47:00 AM	Bubbler valve closed
7/11/2012	10:47:00 AM	Main Vac valve opened
7/11/2012	10:47:00 AM	Helium MFC set to  0.000000
7/11/2012	10:47:00 AM	H2 MFC set to  0.000000
7/11/2012	10:47:00 AM	BCl3 MFC set to  0.000000
7/11/2012	10:47:00 AM	PH3 MFC set to  0.000000
7/11/2012	10:47:00 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:47:00 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:47:00 AM	Tube furnace set to 0
7/11/2012	10:47:30 AM	H2 valve closed
7/11/2012	10:47:30 AM	BCl3 valve closed
7/11/2012	10:47:30 AM	PH3 valve closed
7/11/2012	10:47:30 AM	SiCl4 pre valve closed
7/11/2012	10:47:30 AM	SiCl4 post valve closed
7/11/2012	10:47:30 AM	Bypass valve closed
7/11/2012	10:47:30 AM	Bubbler valve closed
7/11/2012	10:47:30 AM	Helium valve opened
7/11/2012	10:47:30 AM	Main Vac valve opened
7/11/2012	10:47:30 AM	Helium MFC set to  20.000000
7/11/2012	10:47:30 AM	H2 MFC set to  0.000000
7/11/2012	10:47:30 AM	BCl3 MFC set to  0.000000
7/11/2012	10:47:30 AM	PH3 MFC set to  0.000000
7/11/2012	10:47:30 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:47:30 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:47:31 AM	Tube furnace set to 0
7/11/2012	10:48:01 AM	Helium valve closed
7/11/2012	10:48:01 AM	H2 valve closed
7/11/2012	10:48:01 AM	BCl3 valve closed
7/11/2012	10:48:01 AM	PH3 valve closed
7/11/2012	10:48:01 AM	SiCl4 pre valve closed
7/11/2012	10:48:01 AM	SiCl4 post valve closed
7/11/2012	10:48:01 AM	Bypass valve closed
7/11/2012	10:48:01 AM	Bubbler valve closed
7/11/2012	10:48:01 AM	Main Vac valve opened
7/11/2012	10:48:01 AM	Helium MFC set to  0.000000
7/11/2012	10:48:01 AM	H2 MFC set to  0.000000
7/11/2012	10:48:01 AM	BCl3 MFC set to  0.000000
7/11/2012	10:48:01 AM	PH3 MFC set to  0.000000
7/11/2012	10:48:01 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:48:01 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:48:01 AM	Tube furnace set to 0
7/11/2012	10:48:31 AM	H2 valve closed
7/11/2012	10:48:31 AM	BCl3 valve closed
7/11/2012	10:48:31 AM	PH3 valve closed
7/11/2012	10:48:31 AM	SiCl4 pre valve closed
7/11/2012	10:48:31 AM	SiCl4 post valve closed
7/11/2012	10:48:31 AM	Bypass valve closed
7/11/2012	10:48:31 AM	Bubbler valve closed
7/11/2012	10:48:31 AM	Helium valve opened
7/11/2012	10:48:31 AM	Main Vac valve opened
7/11/2012	10:48:31 AM	Helium MFC set to  20.000000
7/11/2012	10:48:31 AM	H2 MFC set to  0.000000
7/11/2012	10:48:31 AM	BCl3 MFC set to  0.000000
7/11/2012	10:48:31 AM	PH3 MFC set to  0.000000
7/11/2012	10:48:31 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:48:31 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:48:31 AM	Tube furnace set to 0
7/11/2012	10:49:01 AM	Helium valve closed
7/11/2012	10:49:01 AM	H2 valve closed
7/11/2012	10:49:01 AM	BCl3 valve closed
7/11/2012	10:49:01 AM	PH3 valve closed
7/11/2012	10:49:01 AM	SiCl4 pre valve closed
7/11/2012	10:49:01 AM	SiCl4 post valve closed
7/11/2012	10:49:01 AM	Bypass valve closed
7/11/2012	10:49:01 AM	Bubbler valve closed
7/11/2012	10:49:01 AM	Main Vac valve opened
7/11/2012	10:49:01 AM	Helium MFC set to  0.000000
7/11/2012	10:49:01 AM	H2 MFC set to  0.000000
7/11/2012	10:49:01 AM	BCl3 MFC set to  0.000000
7/11/2012	10:49:01 AM	PH3 MFC set to  0.000000
7/11/2012	10:49:01 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:49:01 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:49:01 AM	Tube furnace set to 0
7/11/2012	10:49:31 AM	H2 valve closed
7/11/2012	10:49:31 AM	BCl3 valve closed
7/11/2012	10:49:31 AM	PH3 valve closed
7/11/2012	10:49:31 AM	SiCl4 pre valve closed
7/11/2012	10:49:31 AM	SiCl4 post valve closed
7/11/2012	10:49:31 AM	Bypass valve closed
7/11/2012	10:49:31 AM	Bubbler valve closed
7/11/2012	10:49:31 AM	Helium valve opened
7/11/2012	10:49:31 AM	Main Vac valve opened
7/11/2012	10:49:31 AM	Helium MFC set to  20.000000
7/11/2012	10:49:31 AM	H2 MFC set to  0.000000
7/11/2012	10:49:31 AM	BCl3 MFC set to  0.000000
7/11/2012	10:49:31 AM	PH3 MFC set to  0.000000
7/11/2012	10:49:31 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:49:31 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:49:32 AM	Tube furnace set to 0
7/11/2012	10:50:02 AM	Helium valve closed
7/11/2012	10:50:02 AM	H2 valve closed
7/11/2012	10:50:02 AM	BCl3 valve closed
7/11/2012	10:50:02 AM	PH3 valve closed
7/11/2012	10:50:02 AM	SiCl4 pre valve closed
7/11/2012	10:50:02 AM	SiCl4 post valve closed
7/11/2012	10:50:02 AM	Bypass valve closed
7/11/2012	10:50:02 AM	Bubbler valve closed
7/11/2012	10:50:02 AM	Main Vac valve opened
7/11/2012	10:50:02 AM	Helium MFC set to  0.000000
7/11/2012	10:50:02 AM	H2 MFC set to  0.000000
7/11/2012	10:50:02 AM	BCl3 MFC set to  0.000000
7/11/2012	10:50:02 AM	PH3 MFC set to  0.000000
7/11/2012	10:50:02 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:50:02 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:50:02 AM	Tube furnace set to 0
7/11/2012	10:50:32 AM	H2 valve closed
7/11/2012	10:50:32 AM	BCl3 valve closed
7/11/2012	10:50:32 AM	PH3 valve closed
7/11/2012	10:50:32 AM	SiCl4 pre valve closed
7/11/2012	10:50:32 AM	SiCl4 post valve closed
7/11/2012	10:50:32 AM	Bypass valve closed
7/11/2012	10:50:32 AM	Bubbler valve closed
7/11/2012	10:50:32 AM	Helium valve opened
7/11/2012	10:50:32 AM	Main Vac valve opened
7/11/2012	10:50:32 AM	Helium MFC set to  20.000000
7/11/2012	10:50:32 AM	H2 MFC set to  0.000000
7/11/2012	10:50:32 AM	BCl3 MFC set to  0.000000
7/11/2012	10:50:32 AM	PH3 MFC set to  0.000000
7/11/2012	10:50:32 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:50:32 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:50:32 AM	Tube furnace set to 0
7/11/2012	10:51:02 AM	Helium valve closed
7/11/2012	10:51:02 AM	H2 valve closed
7/11/2012	10:51:02 AM	BCl3 valve closed
7/11/2012	10:51:02 AM	PH3 valve closed
7/11/2012	10:51:02 AM	SiCl4 pre valve closed
7/11/2012	10:51:02 AM	SiCl4 post valve closed
7/11/2012	10:51:02 AM	Bypass valve closed
7/11/2012	10:51:02 AM	Bubbler valve closed
7/11/2012	10:51:02 AM	Main Vac valve opened
7/11/2012	10:51:02 AM	Helium MFC set to  0.000000
7/11/2012	10:51:02 AM	H2 MFC set to  0.000000
7/11/2012	10:51:02 AM	BCl3 MFC set to  0.000000
7/11/2012	10:51:02 AM	PH3 MFC set to  0.000000
7/11/2012	10:51:02 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:51:02 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:51:02 AM	Tube furnace set to 0
7/11/2012	10:51:32 AM	H2 valve closed
7/11/2012	10:51:32 AM	BCl3 valve closed
7/11/2012	10:51:32 AM	PH3 valve closed
7/11/2012	10:51:32 AM	SiCl4 pre valve closed
7/11/2012	10:51:32 AM	SiCl4 post valve closed
7/11/2012	10:51:32 AM	Bypass valve closed
7/11/2012	10:51:32 AM	Bubbler valve closed
7/11/2012	10:51:32 AM	Helium valve opened
7/11/2012	10:51:32 AM	Main Vac valve opened
7/11/2012	10:51:32 AM	Helium MFC set to  20.000000
7/11/2012	10:51:32 AM	H2 MFC set to  0.000000
7/11/2012	10:51:32 AM	BCl3 MFC set to  0.000000
7/11/2012	10:51:32 AM	PH3 MFC set to  0.000000
7/11/2012	10:51:32 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:51:32 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:51:33 AM	Tube furnace set to 0
7/11/2012	10:52:03 AM	Helium valve closed
7/11/2012	10:52:03 AM	H2 valve closed
7/11/2012	10:52:03 AM	BCl3 valve closed
7/11/2012	10:52:03 AM	PH3 valve closed
7/11/2012	10:52:03 AM	SiCl4 pre valve closed
7/11/2012	10:52:03 AM	SiCl4 post valve closed
7/11/2012	10:52:03 AM	Bypass valve closed
7/11/2012	10:52:03 AM	Bubbler valve closed
7/11/2012	10:52:03 AM	Main Vac valve opened
7/11/2012	10:52:03 AM	Helium MFC set to  0.000000
7/11/2012	10:52:03 AM	H2 MFC set to  0.000000
7/11/2012	10:52:03 AM	BCl3 MFC set to  0.000000
7/11/2012	10:52:03 AM	PH3 MFC set to  0.000000
7/11/2012	10:52:03 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:52:03 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:52:03 AM	Tube furnace set to 0
7/11/2012	10:52:33 AM	H2 valve closed
7/11/2012	10:52:33 AM	BCl3 valve closed
7/11/2012	10:52:33 AM	PH3 valve closed
7/11/2012	10:52:33 AM	SiCl4 pre valve closed
7/11/2012	10:52:33 AM	SiCl4 post valve closed
7/11/2012	10:52:33 AM	Bypass valve closed
7/11/2012	10:52:33 AM	Bubbler valve closed
7/11/2012	10:52:33 AM	Helium valve opened
7/11/2012	10:52:33 AM	Main Vac valve opened
7/11/2012	10:52:33 AM	Helium MFC set to  20.000000
7/11/2012	10:52:33 AM	H2 MFC set to  0.000000
7/11/2012	10:52:33 AM	BCl3 MFC set to  0.000000
7/11/2012	10:52:33 AM	PH3 MFC set to  0.000000
7/11/2012	10:52:33 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:52:33 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:52:33 AM	Tube furnace set to 0
7/11/2012	10:53:03 AM	Helium valve closed
7/11/2012	10:53:03 AM	H2 valve closed
7/11/2012	10:53:03 AM	BCl3 valve closed
7/11/2012	10:53:03 AM	PH3 valve closed
7/11/2012	10:53:03 AM	SiCl4 pre valve closed
7/11/2012	10:53:03 AM	SiCl4 post valve closed
7/11/2012	10:53:03 AM	Bypass valve closed
7/11/2012	10:53:03 AM	Bubbler valve closed
7/11/2012	10:53:03 AM	Main Vac valve opened
7/11/2012	10:53:03 AM	Helium MFC set to  0.000000
7/11/2012	10:53:03 AM	H2 MFC set to  0.000000
7/11/2012	10:53:03 AM	BCl3 MFC set to  0.000000
7/11/2012	10:53:03 AM	PH3 MFC set to  0.000000
7/11/2012	10:53:03 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:53:03 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:53:03 AM	Tube furnace set to 0
7/11/2012	10:53:33 AM	H2 valve closed
7/11/2012	10:53:33 AM	BCl3 valve closed
7/11/2012	10:53:33 AM	PH3 valve closed
7/11/2012	10:53:33 AM	SiCl4 pre valve closed
7/11/2012	10:53:33 AM	SiCl4 post valve closed
7/11/2012	10:53:33 AM	Bypass valve closed
7/11/2012	10:53:33 AM	Bubbler valve closed
7/11/2012	10:53:33 AM	Helium valve opened
7/11/2012	10:53:33 AM	Main Vac valve opened
7/11/2012	10:53:33 AM	Helium MFC set to  20.000000
7/11/2012	10:53:33 AM	H2 MFC set to  0.000000
7/11/2012	10:53:33 AM	BCl3 MFC set to  0.000000
7/11/2012	10:53:33 AM	PH3 MFC set to  0.000000
7/11/2012	10:53:33 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:53:33 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:53:33 AM	Tube furnace set to 0
7/11/2012	10:54:03 AM	Helium valve closed
7/11/2012	10:54:03 AM	H2 valve closed
7/11/2012	10:54:03 AM	BCl3 valve closed
7/11/2012	10:54:03 AM	PH3 valve closed
7/11/2012	10:54:04 AM	SiCl4 pre valve closed
7/11/2012	10:54:04 AM	SiCl4 post valve closed
7/11/2012	10:54:04 AM	Bypass valve closed
7/11/2012	10:54:04 AM	Bubbler valve closed
7/11/2012	10:54:04 AM	Main Vac valve opened
7/11/2012	10:54:04 AM	Helium MFC set to  0.000000
7/11/2012	10:54:04 AM	H2 MFC set to  0.000000
7/11/2012	10:54:04 AM	BCl3 MFC set to  0.000000
7/11/2012	10:54:04 AM	PH3 MFC set to  0.000000
7/11/2012	10:54:04 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:54:04 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:54:04 AM	Tube furnace set to 0
7/11/2012	10:54:34 AM	H2 valve closed
7/11/2012	10:54:34 AM	BCl3 valve closed
7/11/2012	10:54:34 AM	PH3 valve closed
7/11/2012	10:54:34 AM	SiCl4 pre valve closed
7/11/2012	10:54:34 AM	SiCl4 post valve closed
7/11/2012	10:54:34 AM	Bypass valve closed
7/11/2012	10:54:34 AM	Bubbler valve closed
7/11/2012	10:54:34 AM	Helium valve opened
7/11/2012	10:54:34 AM	Main Vac valve opened
7/11/2012	10:54:34 AM	Helium MFC set to  20.000000
7/11/2012	10:54:34 AM	H2 MFC set to  0.000000
7/11/2012	10:54:34 AM	BCl3 MFC set to  0.000000
7/11/2012	10:54:34 AM	PH3 MFC set to  0.000000
7/11/2012	10:54:34 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:54:34 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:54:34 AM	Tube furnace set to 0
7/11/2012	10:55:04 AM	Helium valve closed
7/11/2012	10:55:04 AM	H2 valve closed
7/11/2012	10:55:04 AM	BCl3 valve closed
7/11/2012	10:55:04 AM	PH3 valve closed
7/11/2012	10:55:04 AM	SiCl4 pre valve closed
7/11/2012	10:55:04 AM	SiCl4 post valve closed
7/11/2012	10:55:04 AM	Bypass valve closed
7/11/2012	10:55:04 AM	Bubbler valve closed
7/11/2012	10:55:04 AM	Main Vac valve opened
7/11/2012	10:55:04 AM	Helium MFC set to  0.000000
7/11/2012	10:55:04 AM	H2 MFC set to  0.000000
7/11/2012	10:55:04 AM	BCl3 MFC set to  0.000000
7/11/2012	10:55:04 AM	PH3 MFC set to  0.000000
7/11/2012	10:55:04 AM	SiCl4 MFC set to  0.000000
7/11/2012	10:55:04 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	10:55:04 AM	Tube furnace set to 0
7/11/2012	10:55:05 AM	Run finished at 10:55 AM
7/11/2012	10:55:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/11/2012	11:01:06 AM	Recipe started at 11:01 AM
7/11/2012	11:01:06 AM	Helium valve closed
7/11/2012	11:01:06 AM	H2 valve closed
7/11/2012	11:01:06 AM	BCl3 valve closed
7/11/2012	11:01:06 AM	PH3 valve closed
7/11/2012	11:01:06 AM	SiCl4 pre valve closed
7/11/2012	11:01:06 AM	SiCl4 post valve closed
7/11/2012	11:01:06 AM	Main Vac valve closed
7/11/2012	11:01:06 AM	Bypass valve closed
7/11/2012	11:01:06 AM	Bubbler valve closed
7/11/2012	11:01:06 AM	Helium MFC set to  0.000000
7/11/2012	11:01:06 AM	H2 MFC set to  0.000000
7/11/2012	11:01:06 AM	BCl3 MFC set to  0.000000
7/11/2012	11:01:06 AM	PH3 MFC set to  0.000000
7/11/2012	11:01:06 AM	SiCl4 MFC set to  0.000000
7/11/2012	11:01:06 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	11:01:06 AM	Tube furnace set to 0
7/11/2012	11:01:09 AM	Helium valve closed
7/11/2012	11:01:09 AM	BCl3 valve closed
7/11/2012	11:01:09 AM	PH3 valve closed
7/11/2012	11:01:09 AM	SiCl4 pre valve closed
7/11/2012	11:01:09 AM	SiCl4 post valve closed
7/11/2012	11:01:09 AM	Main Vac valve closed
7/11/2012	11:01:09 AM	Bypass valve closed
7/11/2012	11:01:09 AM	Bubbler valve closed
7/11/2012	11:01:09 AM	H2 valve opened
7/11/2012	11:01:09 AM	Helium MFC set to  0.000000
7/11/2012	11:01:09 AM	H2 MFC set to  500.000000
7/11/2012	11:01:09 AM	BCl3 MFC set to  0.000000
7/11/2012	11:01:09 AM	PH3 MFC set to  0.000000
7/11/2012	11:01:09 AM	SiCl4 MFC set to  0.000000
7/11/2012	11:01:09 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	11:01:09 AM	Tube furnace set to 0
7/11/2012	11:02:26 AM	Helium valve closed
7/11/2012	11:02:26 AM	BCl3 valve closed
7/11/2012	11:02:26 AM	PH3 valve closed
7/11/2012	11:02:26 AM	SiCl4 pre valve closed
7/11/2012	11:02:26 AM	SiCl4 post valve closed
7/11/2012	11:02:26 AM	Main Vac valve closed
7/11/2012	11:02:26 AM	Bypass valve closed
7/11/2012	11:02:26 AM	H2 valve opened
7/11/2012	11:02:26 AM	Bubbler valve opened
7/11/2012	11:02:26 AM	Helium MFC set to  0.000000
7/11/2012	11:02:26 AM	H2 MFC set to  500.000000
7/11/2012	11:02:26 AM	BCl3 MFC set to  0.000000
7/11/2012	11:02:26 AM	PH3 MFC set to  0.000000
7/11/2012	11:02:26 AM	SiCl4 MFC set to  0.000000
7/11/2012	11:02:26 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	11:02:26 AM	Tube furnace set to 0
7/11/2012	11:02:27 AM	Helium valve closed
7/11/2012	11:02:27 AM	BCl3 valve closed
7/11/2012	11:02:27 AM	PH3 valve closed
7/11/2012	11:02:27 AM	SiCl4 pre valve closed
7/11/2012	11:02:27 AM	SiCl4 post valve closed
7/11/2012	11:02:27 AM	Main Vac valve closed
7/11/2012	11:02:27 AM	Bypass valve closed
7/11/2012	11:02:27 AM	H2 valve opened
7/11/2012	11:02:27 AM	Bubbler valve opened
7/11/2012	11:02:27 AM	Helium MFC set to  0.000000
7/11/2012	11:02:27 AM	H2 MFC set to  500.000000
7/11/2012	11:02:27 AM	BCl3 MFC set to  0.000000
7/11/2012	11:02:27 AM	PH3 MFC set to  0.000000
7/11/2012	11:02:27 AM	SiCl4 MFC set to  0.000000
7/11/2012	11:02:27 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	11:02:27 AM	Tube furnace set to 950
7/11/2012	11:22:27 AM	Helium valve closed
7/11/2012	11:22:27 AM	PH3 valve closed
7/11/2012	11:22:27 AM	Main Vac valve closed
7/11/2012	11:22:27 AM	Bypass valve closed
7/11/2012	11:22:27 AM	H2 valve opened
7/11/2012	11:22:27 AM	BCl3 valve opened
7/11/2012	11:22:27 AM	SiCl4 pre valve opened
7/11/2012	11:22:27 AM	SiCl4 post valve opened
7/11/2012	11:22:27 AM	Bubbler valve opened
7/11/2012	11:22:27 AM	Helium MFC set to  0.000000
7/11/2012	11:22:27 AM	H2 MFC set to  500.000000
7/11/2012	11:22:27 AM	BCl3 MFC set to  1.000000
7/11/2012	11:22:27 AM	PH3 MFC set to  0.000000
7/11/2012	11:22:27 AM	SiCl4 MFC set to  50.000000
7/11/2012	11:22:27 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	11:22:27 AM	Tube furnace set to 950
7/11/2012	11:42:27 AM	Helium valve closed
7/11/2012	11:42:27 AM	BCl3 valve closed
7/11/2012	11:42:27 AM	PH3 valve closed
7/11/2012	11:42:27 AM	SiCl4 pre valve closed
7/11/2012	11:42:27 AM	SiCl4 post valve closed
7/11/2012	11:42:27 AM	Main Vac valve closed
7/11/2012	11:42:27 AM	Bypass valve closed
7/11/2012	11:42:27 AM	H2 valve opened
7/11/2012	11:42:27 AM	Bubbler valve opened
7/11/2012	11:42:27 AM	Helium MFC set to  0.000000
7/11/2012	11:42:27 AM	H2 MFC set to  500.000000
7/11/2012	11:42:27 AM	BCl3 MFC set to  0.000000
7/11/2012	11:42:27 AM	PH3 MFC set to  0.000000
7/11/2012	11:42:27 AM	SiCl4 MFC set to  0.000000
7/11/2012	11:42:27 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	11:42:27 AM	Tube furnace set to 750
7/11/2012	11:47:27 AM	H2 valve closed
7/11/2012	11:47:27 AM	BCl3 valve closed
7/11/2012	11:47:27 AM	PH3 valve closed
7/11/2012	11:47:27 AM	SiCl4 pre valve closed
7/11/2012	11:47:27 AM	SiCl4 post valve closed
7/11/2012	11:47:27 AM	Main Vac valve closed
7/11/2012	11:47:27 AM	Bypass valve closed
7/11/2012	11:47:27 AM	Helium valve opened
7/11/2012	11:47:27 AM	Bubbler valve opened
7/11/2012	11:47:27 AM	Helium MFC set to  500.000000
7/11/2012	11:47:27 AM	H2 MFC set to  0.000000
7/11/2012	11:47:27 AM	BCl3 MFC set to  0.000000
7/11/2012	11:47:27 AM	PH3 MFC set to  0.000000
7/11/2012	11:47:27 AM	SiCl4 MFC set to  0.000000
7/11/2012	11:47:27 AM	Bypass solenoid MFC set to  0.000000
7/11/2012	11:47:28 AM	Tube furnace set to 0
7/11/2012	12:07:28 PM	Helium valve closed
7/11/2012	12:07:28 PM	H2 valve closed
7/11/2012	12:07:28 PM	BCl3 valve closed
7/11/2012	12:07:28 PM	PH3 valve closed
7/11/2012	12:07:28 PM	SiCl4 pre valve closed
7/11/2012	12:07:28 PM	SiCl4 post valve closed
7/11/2012	12:07:28 PM	Main Vac valve closed
7/11/2012	12:07:28 PM	Bypass valve closed
7/11/2012	12:07:28 PM	Bubbler valve closed
7/11/2012	12:07:28 PM	Helium MFC set to  0.000000
7/11/2012	12:07:28 PM	H2 MFC set to  0.000000
7/11/2012	12:07:28 PM	BCl3 MFC set to  0.000000
7/11/2012	12:07:28 PM	PH3 MFC set to  0.000000
7/11/2012	12:07:28 PM	SiCl4 MFC set to  0.000000
7/11/2012	12:07:28 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	12:07:28 PM	Tube furnace set to 0
7/11/2012	12:07:29 PM	Run finished at 12:07 PM
7/11/2012	12:37:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	12:37:07 PM	Recipe started at 12:37 PM
7/11/2012	12:37:08 PM	Helium valve closed
7/11/2012	12:37:08 PM	H2 valve closed
7/11/2012	12:37:08 PM	BCl3 valve closed
7/11/2012	12:37:08 PM	PH3 valve closed
7/11/2012	12:37:08 PM	SiCl4 pre valve closed
7/11/2012	12:37:08 PM	SiCl4 post valve closed
7/11/2012	12:37:08 PM	Main Vac valve closed
7/11/2012	12:37:08 PM	Bubbler valve closed
7/11/2012	12:37:08 PM	Bypass valve opened
7/11/2012	12:37:08 PM	Helium MFC set to  0.000000
7/11/2012	12:37:08 PM	H2 MFC set to  0.000000
7/11/2012	12:37:08 PM	BCl3 MFC set to  0.000000
7/11/2012	12:37:08 PM	PH3 MFC set to  0.000000
7/11/2012	12:37:08 PM	SiCl4 MFC set to  0.000000
7/11/2012	12:37:08 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	12:37:08 PM	Tube furnace set to 0
7/11/2012	12:38:19 PM	Helium valve closed
7/11/2012	12:38:19 PM	H2 valve closed
7/11/2012	12:38:19 PM	BCl3 valve closed
7/11/2012	12:38:19 PM	PH3 valve closed
7/11/2012	12:38:19 PM	SiCl4 pre valve closed
7/11/2012	12:38:19 PM	SiCl4 post valve closed
7/11/2012	12:38:19 PM	Main Vac valve closed
7/11/2012	12:38:19 PM	Bubbler valve closed
7/11/2012	12:38:19 PM	Bypass valve opened
7/11/2012	12:38:19 PM	Helium MFC set to  0.000000
7/11/2012	12:38:19 PM	H2 MFC set to  0.000000
7/11/2012	12:38:19 PM	BCl3 MFC set to  0.000000
7/11/2012	12:38:19 PM	PH3 MFC set to  0.000000
7/11/2012	12:38:19 PM	SiCl4 MFC set to  0.000000
7/11/2012	12:38:19 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	12:38:19 PM	Tube furnace set to 0
7/11/2012	12:39:19 PM	Helium valve closed
7/11/2012	12:39:19 PM	H2 valve closed
7/11/2012	12:39:19 PM	BCl3 valve closed
7/11/2012	12:39:20 PM	PH3 valve closed
7/11/2012	12:39:20 PM	SiCl4 pre valve closed
7/11/2012	12:39:20 PM	SiCl4 post valve closed
7/11/2012	12:39:20 PM	Bypass valve closed
7/11/2012	12:39:20 PM	Bubbler valve closed
7/11/2012	12:39:20 PM	Main Vac valve opened
7/11/2012	12:39:20 PM	Helium MFC set to  0.000000
7/11/2012	12:39:20 PM	H2 MFC set to  0.000000
7/11/2012	12:39:20 PM	BCl3 MFC set to  0.000000
7/11/2012	12:39:20 PM	PH3 MFC set to  0.000000
7/11/2012	12:39:20 PM	SiCl4 MFC set to  0.000000
7/11/2012	12:39:20 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	12:39:20 PM	Tube furnace set to 0
7/11/2012	12:39:21 PM	Run finished at 12:39 PM
7/11/2012	12:39:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	12:59:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/11/2012	1:00:05 PM	Recipe started at 12:59 PM
7/11/2012	1:00:05 PM	Helium valve closed
7/11/2012	1:00:05 PM	H2 valve closed
7/11/2012	1:00:05 PM	BCl3 valve closed
7/11/2012	1:00:05 PM	PH3 valve closed
7/11/2012	1:00:05 PM	SiCl4 pre valve closed
7/11/2012	1:00:05 PM	SiCl4 post valve closed
7/11/2012	1:00:05 PM	Main Vac valve closed
7/11/2012	1:00:05 PM	Bubbler valve closed
7/11/2012	1:00:05 PM	Bypass valve opened
7/11/2012	1:00:05 PM	Helium MFC set to  0.000000
7/11/2012	1:00:05 PM	H2 MFC set to  0.000000
7/11/2012	1:00:05 PM	BCl3 MFC set to  0.000000
7/11/2012	1:00:05 PM	PH3 MFC set to  0.000000
7/11/2012	1:00:05 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:00:05 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:00:05 PM	Tube furnace set to 0
7/11/2012	1:00:05 PM	Helium valve closed
7/11/2012	1:00:05 PM	H2 valve closed
7/11/2012	1:00:05 PM	BCl3 valve closed
7/11/2012	1:00:05 PM	PH3 valve closed
7/11/2012	1:00:05 PM	SiCl4 pre valve closed
7/11/2012	1:00:05 PM	SiCl4 post valve closed
7/11/2012	1:00:05 PM	Main Vac valve closed
7/11/2012	1:00:05 PM	Bubbler valve closed
7/11/2012	1:00:05 PM	Bypass valve opened
7/11/2012	1:00:05 PM	Helium MFC set to  0.000000
7/11/2012	1:00:05 PM	H2 MFC set to  0.000000
7/11/2012	1:00:05 PM	BCl3 MFC set to  0.000000
7/11/2012	1:00:05 PM	PH3 MFC set to  0.000000
7/11/2012	1:00:05 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:00:05 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:00:06 PM	Tube furnace set to 0
7/11/2012	1:00:07 PM	Helium valve closed
7/11/2012	1:00:07 PM	H2 valve closed
7/11/2012	1:00:07 PM	BCl3 valve closed
7/11/2012	1:00:07 PM	PH3 valve closed
7/11/2012	1:00:07 PM	SiCl4 pre valve closed
7/11/2012	1:00:07 PM	SiCl4 post valve closed
7/11/2012	1:00:07 PM	Bypass valve closed
7/11/2012	1:00:07 PM	Bubbler valve closed
7/11/2012	1:00:07 PM	Main Vac valve opened
7/11/2012	1:00:07 PM	Helium MFC set to  0.000000
7/11/2012	1:00:07 PM	H2 MFC set to  0.000000
7/11/2012	1:00:07 PM	BCl3 MFC set to  0.000000
7/11/2012	1:00:07 PM	PH3 MFC set to  0.000000
7/11/2012	1:00:07 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:00:07 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:00:08 PM	Tube furnace set to 0
7/11/2012	1:00:08 PM	H2 valve closed
7/11/2012	1:00:08 PM	BCl3 valve closed
7/11/2012	1:00:08 PM	PH3 valve closed
7/11/2012	1:00:08 PM	SiCl4 pre valve closed
7/11/2012	1:00:08 PM	SiCl4 post valve closed
7/11/2012	1:00:08 PM	Bypass valve closed
7/11/2012	1:00:08 PM	Bubbler valve closed
7/11/2012	1:00:08 PM	Helium valve opened
7/11/2012	1:00:08 PM	Main Vac valve opened
7/11/2012	1:00:08 PM	Helium MFC set to  20.000000
7/11/2012	1:00:08 PM	H2 MFC set to  0.000000
7/11/2012	1:00:08 PM	BCl3 MFC set to  0.000000
7/11/2012	1:00:08 PM	PH3 MFC set to  0.000000
7/11/2012	1:00:08 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:00:08 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:00:08 PM	Tube furnace set to 0
7/11/2012	1:00:38 PM	Helium valve closed
7/11/2012	1:00:38 PM	H2 valve closed
7/11/2012	1:00:38 PM	BCl3 valve closed
7/11/2012	1:00:38 PM	PH3 valve closed
7/11/2012	1:00:38 PM	SiCl4 pre valve closed
7/11/2012	1:00:38 PM	SiCl4 post valve closed
7/11/2012	1:00:38 PM	Bypass valve closed
7/11/2012	1:00:38 PM	Bubbler valve closed
7/11/2012	1:00:38 PM	Main Vac valve opened
7/11/2012	1:00:38 PM	Helium MFC set to  0.000000
7/11/2012	1:00:38 PM	H2 MFC set to  0.000000
7/11/2012	1:00:38 PM	BCl3 MFC set to  0.000000
7/11/2012	1:00:38 PM	PH3 MFC set to  0.000000
7/11/2012	1:00:38 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:00:38 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:00:39 PM	Tube furnace set to 0
7/11/2012	1:01:09 PM	H2 valve closed
7/11/2012	1:01:09 PM	BCl3 valve closed
7/11/2012	1:01:09 PM	PH3 valve closed
7/11/2012	1:01:09 PM	SiCl4 pre valve closed
7/11/2012	1:01:09 PM	SiCl4 post valve closed
7/11/2012	1:01:09 PM	Bypass valve closed
7/11/2012	1:01:09 PM	Bubbler valve closed
7/11/2012	1:01:09 PM	Helium valve opened
7/11/2012	1:01:09 PM	Main Vac valve opened
7/11/2012	1:01:09 PM	Helium MFC set to  20.000000
7/11/2012	1:01:09 PM	H2 MFC set to  0.000000
7/11/2012	1:01:09 PM	BCl3 MFC set to  0.000000
7/11/2012	1:01:09 PM	PH3 MFC set to  0.000000
7/11/2012	1:01:09 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:01:09 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:01:09 PM	Tube furnace set to 0
7/11/2012	1:01:39 PM	Helium valve closed
7/11/2012	1:01:39 PM	H2 valve closed
7/11/2012	1:01:39 PM	BCl3 valve closed
7/11/2012	1:01:39 PM	PH3 valve closed
7/11/2012	1:01:39 PM	SiCl4 pre valve closed
7/11/2012	1:01:39 PM	SiCl4 post valve closed
7/11/2012	1:01:39 PM	Bypass valve closed
7/11/2012	1:01:39 PM	Bubbler valve closed
7/11/2012	1:01:39 PM	Main Vac valve opened
7/11/2012	1:01:39 PM	Helium MFC set to  0.000000
7/11/2012	1:01:39 PM	H2 MFC set to  0.000000
7/11/2012	1:01:39 PM	BCl3 MFC set to  0.000000
7/11/2012	1:01:39 PM	PH3 MFC set to  0.000000
7/11/2012	1:01:39 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:01:39 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:01:39 PM	Tube furnace set to 0
7/11/2012	1:02:09 PM	H2 valve closed
7/11/2012	1:02:09 PM	BCl3 valve closed
7/11/2012	1:02:09 PM	PH3 valve closed
7/11/2012	1:02:09 PM	SiCl4 pre valve closed
7/11/2012	1:02:09 PM	SiCl4 post valve closed
7/11/2012	1:02:09 PM	Bypass valve closed
7/11/2012	1:02:09 PM	Bubbler valve closed
7/11/2012	1:02:09 PM	Helium valve opened
7/11/2012	1:02:09 PM	Main Vac valve opened
7/11/2012	1:02:09 PM	Helium MFC set to  20.000000
7/11/2012	1:02:09 PM	H2 MFC set to  0.000000
7/11/2012	1:02:09 PM	BCl3 MFC set to  0.000000
7/11/2012	1:02:09 PM	PH3 MFC set to  0.000000
7/11/2012	1:02:09 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:02:09 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:02:09 PM	Tube furnace set to 0
7/11/2012	1:02:39 PM	Helium valve closed
7/11/2012	1:02:39 PM	H2 valve closed
7/11/2012	1:02:39 PM	BCl3 valve closed
7/11/2012	1:02:39 PM	PH3 valve closed
7/11/2012	1:02:39 PM	SiCl4 pre valve closed
7/11/2012	1:02:39 PM	SiCl4 post valve closed
7/11/2012	1:02:39 PM	Bypass valve closed
7/11/2012	1:02:39 PM	Bubbler valve closed
7/11/2012	1:02:39 PM	Main Vac valve opened
7/11/2012	1:02:39 PM	Helium MFC set to  0.000000
7/11/2012	1:02:39 PM	H2 MFC set to  0.000000
7/11/2012	1:02:39 PM	BCl3 MFC set to  0.000000
7/11/2012	1:02:39 PM	PH3 MFC set to  0.000000
7/11/2012	1:02:39 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:02:39 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:02:40 PM	Tube furnace set to 0
7/11/2012	1:03:10 PM	H2 valve closed
7/11/2012	1:03:10 PM	BCl3 valve closed
7/11/2012	1:03:10 PM	PH3 valve closed
7/11/2012	1:03:10 PM	SiCl4 pre valve closed
7/11/2012	1:03:10 PM	SiCl4 post valve closed
7/11/2012	1:03:10 PM	Bypass valve closed
7/11/2012	1:03:10 PM	Bubbler valve closed
7/11/2012	1:03:10 PM	Helium valve opened
7/11/2012	1:03:10 PM	Main Vac valve opened
7/11/2012	1:03:10 PM	Helium MFC set to  20.000000
7/11/2012	1:03:10 PM	H2 MFC set to  0.000000
7/11/2012	1:03:10 PM	BCl3 MFC set to  0.000000
7/11/2012	1:03:10 PM	PH3 MFC set to  0.000000
7/11/2012	1:03:10 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:03:10 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:03:10 PM	Tube furnace set to 0
7/11/2012	1:03:40 PM	Helium valve closed
7/11/2012	1:03:40 PM	H2 valve closed
7/11/2012	1:03:40 PM	BCl3 valve closed
7/11/2012	1:03:40 PM	PH3 valve closed
7/11/2012	1:03:40 PM	SiCl4 pre valve closed
7/11/2012	1:03:40 PM	SiCl4 post valve closed
7/11/2012	1:03:40 PM	Bypass valve closed
7/11/2012	1:03:40 PM	Bubbler valve closed
7/11/2012	1:03:40 PM	Main Vac valve opened
7/11/2012	1:03:40 PM	Helium MFC set to  0.000000
7/11/2012	1:03:40 PM	H2 MFC set to  0.000000
7/11/2012	1:03:40 PM	BCl3 MFC set to  0.000000
7/11/2012	1:03:40 PM	PH3 MFC set to  0.000000
7/11/2012	1:03:40 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:03:40 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:03:40 PM	Tube furnace set to 0
7/11/2012	1:04:10 PM	H2 valve closed
7/11/2012	1:04:10 PM	BCl3 valve closed
7/11/2012	1:04:10 PM	PH3 valve closed
7/11/2012	1:04:10 PM	SiCl4 pre valve closed
7/11/2012	1:04:10 PM	SiCl4 post valve closed
7/11/2012	1:04:10 PM	Bypass valve closed
7/11/2012	1:04:10 PM	Bubbler valve closed
7/11/2012	1:04:10 PM	Helium valve opened
7/11/2012	1:04:10 PM	Main Vac valve opened
7/11/2012	1:04:10 PM	Helium MFC set to  20.000000
7/11/2012	1:04:10 PM	H2 MFC set to  0.000000
7/11/2012	1:04:10 PM	BCl3 MFC set to  0.000000
7/11/2012	1:04:10 PM	PH3 MFC set to  0.000000
7/11/2012	1:04:10 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:04:10 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:04:10 PM	Tube furnace set to 0
7/11/2012	1:04:40 PM	Helium valve closed
7/11/2012	1:04:40 PM	H2 valve closed
7/11/2012	1:04:40 PM	BCl3 valve closed
7/11/2012	1:04:40 PM	PH3 valve closed
7/11/2012	1:04:40 PM	SiCl4 pre valve closed
7/11/2012	1:04:40 PM	SiCl4 post valve closed
7/11/2012	1:04:40 PM	Bypass valve closed
7/11/2012	1:04:40 PM	Bubbler valve closed
7/11/2012	1:04:40 PM	Main Vac valve opened
7/11/2012	1:04:40 PM	Helium MFC set to  0.000000
7/11/2012	1:04:40 PM	H2 MFC set to  0.000000
7/11/2012	1:04:40 PM	BCl3 MFC set to  0.000000
7/11/2012	1:04:40 PM	PH3 MFC set to  0.000000
7/11/2012	1:04:40 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:04:40 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:04:40 PM	Tube furnace set to 0
7/11/2012	1:05:10 PM	H2 valve closed
7/11/2012	1:05:10 PM	BCl3 valve closed
7/11/2012	1:05:11 PM	PH3 valve closed
7/11/2012	1:05:11 PM	SiCl4 pre valve closed
7/11/2012	1:05:11 PM	SiCl4 post valve closed
7/11/2012	1:05:11 PM	Bypass valve closed
7/11/2012	1:05:11 PM	Bubbler valve closed
7/11/2012	1:05:11 PM	Helium valve opened
7/11/2012	1:05:11 PM	Main Vac valve opened
7/11/2012	1:05:11 PM	Helium MFC set to  20.000000
7/11/2012	1:05:11 PM	H2 MFC set to  0.000000
7/11/2012	1:05:11 PM	BCl3 MFC set to  0.000000
7/11/2012	1:05:11 PM	PH3 MFC set to  0.000000
7/11/2012	1:05:11 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:05:11 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:05:11 PM	Tube furnace set to 0
7/11/2012	1:05:41 PM	Helium valve closed
7/11/2012	1:05:41 PM	H2 valve closed
7/11/2012	1:05:41 PM	BCl3 valve closed
7/11/2012	1:05:41 PM	PH3 valve closed
7/11/2012	1:05:41 PM	SiCl4 pre valve closed
7/11/2012	1:05:41 PM	SiCl4 post valve closed
7/11/2012	1:05:41 PM	Bypass valve closed
7/11/2012	1:05:41 PM	Bubbler valve closed
7/11/2012	1:05:41 PM	Main Vac valve opened
7/11/2012	1:05:41 PM	Helium MFC set to  0.000000
7/11/2012	1:05:41 PM	H2 MFC set to  0.000000
7/11/2012	1:05:41 PM	BCl3 MFC set to  0.000000
7/11/2012	1:05:41 PM	PH3 MFC set to  0.000000
7/11/2012	1:05:41 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:05:41 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:05:41 PM	Tube furnace set to 0
7/11/2012	1:06:11 PM	H2 valve closed
7/11/2012	1:06:11 PM	BCl3 valve closed
7/11/2012	1:06:11 PM	PH3 valve closed
7/11/2012	1:06:11 PM	SiCl4 pre valve closed
7/11/2012	1:06:11 PM	SiCl4 post valve closed
7/11/2012	1:06:11 PM	Bypass valve closed
7/11/2012	1:06:11 PM	Bubbler valve closed
7/11/2012	1:06:11 PM	Helium valve opened
7/11/2012	1:06:11 PM	Main Vac valve opened
7/11/2012	1:06:11 PM	Helium MFC set to  20.000000
7/11/2012	1:06:11 PM	H2 MFC set to  0.000000
7/11/2012	1:06:11 PM	BCl3 MFC set to  0.000000
7/11/2012	1:06:11 PM	PH3 MFC set to  0.000000
7/11/2012	1:06:11 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:06:11 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:06:11 PM	Tube furnace set to 0
7/11/2012	1:06:41 PM	Helium valve closed
7/11/2012	1:06:41 PM	H2 valve closed
7/11/2012	1:06:41 PM	BCl3 valve closed
7/11/2012	1:06:41 PM	PH3 valve closed
7/11/2012	1:06:41 PM	SiCl4 pre valve closed
7/11/2012	1:06:41 PM	SiCl4 post valve closed
7/11/2012	1:06:41 PM	Bypass valve closed
7/11/2012	1:06:41 PM	Bubbler valve closed
7/11/2012	1:06:41 PM	Main Vac valve opened
7/11/2012	1:06:41 PM	Helium MFC set to  0.000000
7/11/2012	1:06:41 PM	H2 MFC set to  0.000000
7/11/2012	1:06:41 PM	BCl3 MFC set to  0.000000
7/11/2012	1:06:41 PM	PH3 MFC set to  0.000000
7/11/2012	1:06:41 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:06:41 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:06:41 PM	Tube furnace set to 0
7/11/2012	1:07:11 PM	H2 valve closed
7/11/2012	1:07:11 PM	BCl3 valve closed
7/11/2012	1:07:11 PM	PH3 valve closed
7/11/2012	1:07:11 PM	SiCl4 pre valve closed
7/11/2012	1:07:11 PM	SiCl4 post valve closed
7/11/2012	1:07:11 PM	Bypass valve closed
7/11/2012	1:07:11 PM	Bubbler valve closed
7/11/2012	1:07:11 PM	Helium valve opened
7/11/2012	1:07:11 PM	Main Vac valve opened
7/11/2012	1:07:11 PM	Helium MFC set to  20.000000
7/11/2012	1:07:11 PM	H2 MFC set to  0.000000
7/11/2012	1:07:11 PM	BCl3 MFC set to  0.000000
7/11/2012	1:07:11 PM	PH3 MFC set to  0.000000
7/11/2012	1:07:11 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:07:12 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:07:12 PM	Tube furnace set to 0
7/11/2012	1:07:42 PM	Helium valve closed
7/11/2012	1:07:42 PM	H2 valve closed
7/11/2012	1:07:42 PM	BCl3 valve closed
7/11/2012	1:07:42 PM	PH3 valve closed
7/11/2012	1:07:42 PM	SiCl4 pre valve closed
7/11/2012	1:07:42 PM	SiCl4 post valve closed
7/11/2012	1:07:42 PM	Bypass valve closed
7/11/2012	1:07:42 PM	Bubbler valve closed
7/11/2012	1:07:42 PM	Main Vac valve opened
7/11/2012	1:07:42 PM	Helium MFC set to  0.000000
7/11/2012	1:07:42 PM	H2 MFC set to  0.000000
7/11/2012	1:07:42 PM	BCl3 MFC set to  0.000000
7/11/2012	1:07:42 PM	PH3 MFC set to  0.000000
7/11/2012	1:07:42 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:07:42 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:07:42 PM	Tube furnace set to 0
7/11/2012	1:08:12 PM	H2 valve closed
7/11/2012	1:08:12 PM	BCl3 valve closed
7/11/2012	1:08:12 PM	PH3 valve closed
7/11/2012	1:08:12 PM	SiCl4 pre valve closed
7/11/2012	1:08:12 PM	SiCl4 post valve closed
7/11/2012	1:08:12 PM	Bypass valve closed
7/11/2012	1:08:12 PM	Bubbler valve closed
7/11/2012	1:08:12 PM	Helium valve opened
7/11/2012	1:08:12 PM	Main Vac valve opened
7/11/2012	1:08:12 PM	Helium MFC set to  20.000000
7/11/2012	1:08:12 PM	H2 MFC set to  0.000000
7/11/2012	1:08:12 PM	BCl3 MFC set to  0.000000
7/11/2012	1:08:12 PM	PH3 MFC set to  0.000000
7/11/2012	1:08:12 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:08:12 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:08:12 PM	Tube furnace set to 0
7/11/2012	1:08:42 PM	Helium valve closed
7/11/2012	1:08:42 PM	H2 valve closed
7/11/2012	1:08:42 PM	BCl3 valve closed
7/11/2012	1:08:42 PM	PH3 valve closed
7/11/2012	1:08:42 PM	SiCl4 pre valve closed
7/11/2012	1:08:42 PM	SiCl4 post valve closed
7/11/2012	1:08:42 PM	Bypass valve closed
7/11/2012	1:08:42 PM	Bubbler valve closed
7/11/2012	1:08:42 PM	Main Vac valve opened
7/11/2012	1:08:42 PM	Helium MFC set to  0.000000
7/11/2012	1:08:42 PM	H2 MFC set to  0.000000
7/11/2012	1:08:42 PM	BCl3 MFC set to  0.000000
7/11/2012	1:08:42 PM	PH3 MFC set to  0.000000
7/11/2012	1:08:42 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:08:42 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:08:42 PM	Tube furnace set to 0
7/11/2012	1:09:12 PM	H2 valve closed
7/11/2012	1:09:12 PM	BCl3 valve closed
7/11/2012	1:09:12 PM	PH3 valve closed
7/11/2012	1:09:12 PM	SiCl4 pre valve closed
7/11/2012	1:09:12 PM	SiCl4 post valve closed
7/11/2012	1:09:12 PM	Bypass valve closed
7/11/2012	1:09:12 PM	Bubbler valve closed
7/11/2012	1:09:12 PM	Helium valve opened
7/11/2012	1:09:12 PM	Main Vac valve opened
7/11/2012	1:09:12 PM	Helium MFC set to  20.000000
7/11/2012	1:09:12 PM	H2 MFC set to  0.000000
7/11/2012	1:09:12 PM	BCl3 MFC set to  0.000000
7/11/2012	1:09:12 PM	PH3 MFC set to  0.000000
7/11/2012	1:09:12 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:09:12 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:09:13 PM	Tube furnace set to 0
7/11/2012	1:09:43 PM	Helium valve closed
7/11/2012	1:09:43 PM	H2 valve closed
7/11/2012	1:09:43 PM	BCl3 valve closed
7/11/2012	1:09:43 PM	PH3 valve closed
7/11/2012	1:09:43 PM	SiCl4 pre valve closed
7/11/2012	1:09:43 PM	SiCl4 post valve closed
7/11/2012	1:09:43 PM	Bypass valve closed
7/11/2012	1:09:43 PM	Bubbler valve closed
7/11/2012	1:09:43 PM	Main Vac valve opened
7/11/2012	1:09:43 PM	Helium MFC set to  0.000000
7/11/2012	1:09:43 PM	H2 MFC set to  0.000000
7/11/2012	1:09:43 PM	BCl3 MFC set to  0.000000
7/11/2012	1:09:43 PM	PH3 MFC set to  0.000000
7/11/2012	1:09:43 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:09:43 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:09:43 PM	Tube furnace set to 0
7/11/2012	1:09:44 PM	Run finished at 1:09 PM
7/11/2012	1:09:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/11/2012	1:14:20 PM	Recipe started at 1:14 PM
7/11/2012	1:14:20 PM	Helium valve closed
7/11/2012	1:14:20 PM	H2 valve closed
7/11/2012	1:14:20 PM	BCl3 valve closed
7/11/2012	1:14:20 PM	PH3 valve closed
7/11/2012	1:14:20 PM	SiCl4 pre valve closed
7/11/2012	1:14:20 PM	SiCl4 post valve closed
7/11/2012	1:14:20 PM	Main Vac valve closed
7/11/2012	1:14:20 PM	Bypass valve closed
7/11/2012	1:14:20 PM	Bubbler valve closed
7/11/2012	1:14:20 PM	Helium MFC set to  0.000000
7/11/2012	1:14:20 PM	H2 MFC set to  0.000000
7/11/2012	1:14:20 PM	BCl3 MFC set to  0.000000
7/11/2012	1:14:20 PM	PH3 MFC set to  0.000000
7/11/2012	1:14:20 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:14:20 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:14:20 PM	Tube furnace set to 0
7/11/2012	1:14:23 PM	Helium valve closed
7/11/2012	1:14:23 PM	BCl3 valve closed
7/11/2012	1:14:23 PM	PH3 valve closed
7/11/2012	1:14:23 PM	SiCl4 pre valve closed
7/11/2012	1:14:23 PM	SiCl4 post valve closed
7/11/2012	1:14:23 PM	Main Vac valve closed
7/11/2012	1:14:23 PM	Bypass valve closed
7/11/2012	1:14:23 PM	Bubbler valve closed
7/11/2012	1:14:23 PM	H2 valve opened
7/11/2012	1:14:23 PM	Helium MFC set to  0.000000
7/11/2012	1:14:23 PM	H2 MFC set to  500.000000
7/11/2012	1:14:23 PM	BCl3 MFC set to  0.000000
7/11/2012	1:14:23 PM	PH3 MFC set to  0.000000
7/11/2012	1:14:23 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:14:23 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:14:23 PM	Tube furnace set to 0
7/11/2012	1:15:38 PM	Helium valve closed
7/11/2012	1:15:38 PM	BCl3 valve closed
7/11/2012	1:15:38 PM	PH3 valve closed
7/11/2012	1:15:38 PM	SiCl4 pre valve closed
7/11/2012	1:15:38 PM	SiCl4 post valve closed
7/11/2012	1:15:38 PM	Main Vac valve closed
7/11/2012	1:15:38 PM	Bypass valve closed
7/11/2012	1:15:38 PM	H2 valve opened
7/11/2012	1:15:38 PM	Bubbler valve opened
7/11/2012	1:15:38 PM	Helium MFC set to  0.000000
7/11/2012	1:15:38 PM	H2 MFC set to  500.000000
7/11/2012	1:15:38 PM	BCl3 MFC set to  0.000000
7/11/2012	1:15:38 PM	PH3 MFC set to  0.000000
7/11/2012	1:15:38 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:15:38 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:15:38 PM	Tube furnace set to 0
7/11/2012	1:15:39 PM	Helium valve closed
7/11/2012	1:15:39 PM	BCl3 valve closed
7/11/2012	1:15:39 PM	PH3 valve closed
7/11/2012	1:15:39 PM	SiCl4 pre valve closed
7/11/2012	1:15:39 PM	SiCl4 post valve closed
7/11/2012	1:15:39 PM	Main Vac valve closed
7/11/2012	1:15:39 PM	Bypass valve closed
7/11/2012	1:15:39 PM	H2 valve opened
7/11/2012	1:15:39 PM	Bubbler valve opened
7/11/2012	1:15:39 PM	Helium MFC set to  0.000000
7/11/2012	1:15:39 PM	H2 MFC set to  500.000000
7/11/2012	1:15:39 PM	BCl3 MFC set to  0.000000
7/11/2012	1:15:39 PM	PH3 MFC set to  0.000000
7/11/2012	1:15:39 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:15:39 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:15:39 PM	Tube furnace set to 950
7/11/2012	1:35:39 PM	Helium valve closed
7/11/2012	1:35:39 PM	PH3 valve closed
7/11/2012	1:35:39 PM	Main Vac valve closed
7/11/2012	1:35:39 PM	Bypass valve closed
7/11/2012	1:35:39 PM	H2 valve opened
7/11/2012	1:35:39 PM	BCl3 valve opened
7/11/2012	1:35:39 PM	SiCl4 pre valve opened
7/11/2012	1:35:39 PM	SiCl4 post valve opened
7/11/2012	1:35:39 PM	Bubbler valve opened
7/11/2012	1:35:39 PM	Helium MFC set to  0.000000
7/11/2012	1:35:39 PM	H2 MFC set to  500.000000
7/11/2012	1:35:39 PM	BCl3 MFC set to  1.000000
7/11/2012	1:35:39 PM	PH3 MFC set to  0.000000
7/11/2012	1:35:39 PM	SiCl4 MFC set to  75.000000
7/11/2012	1:35:39 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:35:39 PM	Tube furnace set to 950
7/11/2012	1:55:39 PM	Helium valve closed
7/11/2012	1:55:39 PM	BCl3 valve closed
7/11/2012	1:55:39 PM	PH3 valve closed
7/11/2012	1:55:39 PM	SiCl4 pre valve closed
7/11/2012	1:55:39 PM	SiCl4 post valve closed
7/11/2012	1:55:39 PM	Main Vac valve closed
7/11/2012	1:55:39 PM	Bypass valve closed
7/11/2012	1:55:39 PM	H2 valve opened
7/11/2012	1:55:39 PM	Bubbler valve opened
7/11/2012	1:55:39 PM	Helium MFC set to  0.000000
7/11/2012	1:55:39 PM	H2 MFC set to  500.000000
7/11/2012	1:55:39 PM	BCl3 MFC set to  0.000000
7/11/2012	1:55:39 PM	PH3 MFC set to  0.000000
7/11/2012	1:55:39 PM	SiCl4 MFC set to  0.000000
7/11/2012	1:55:39 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	1:55:39 PM	Tube furnace set to 750
7/11/2012	2:00:39 PM	H2 valve closed
7/11/2012	2:00:39 PM	BCl3 valve closed
7/11/2012	2:00:39 PM	PH3 valve closed
7/11/2012	2:00:39 PM	SiCl4 pre valve closed
7/11/2012	2:00:39 PM	SiCl4 post valve closed
7/11/2012	2:00:39 PM	Main Vac valve closed
7/11/2012	2:00:39 PM	Bypass valve closed
7/11/2012	2:00:39 PM	Helium valve opened
7/11/2012	2:00:39 PM	Bubbler valve opened
7/11/2012	2:00:39 PM	Helium MFC set to  500.000000
7/11/2012	2:00:39 PM	H2 MFC set to  0.000000
7/11/2012	2:00:39 PM	BCl3 MFC set to  0.000000
7/11/2012	2:00:39 PM	PH3 MFC set to  0.000000
7/11/2012	2:00:39 PM	SiCl4 MFC set to  0.000000
7/11/2012	2:00:39 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	2:00:40 PM	Tube furnace set to 0
7/11/2012	2:20:39 PM	Helium valve closed
7/11/2012	2:20:40 PM	H2 valve closed
7/11/2012	2:20:40 PM	BCl3 valve closed
7/11/2012	2:20:40 PM	PH3 valve closed
7/11/2012	2:20:40 PM	SiCl4 pre valve closed
7/11/2012	2:20:40 PM	SiCl4 post valve closed
7/11/2012	2:20:40 PM	Main Vac valve closed
7/11/2012	2:20:40 PM	Bypass valve closed
7/11/2012	2:20:40 PM	Bubbler valve closed
7/11/2012	2:20:40 PM	Helium MFC set to  0.000000
7/11/2012	2:20:40 PM	H2 MFC set to  0.000000
7/11/2012	2:20:40 PM	BCl3 MFC set to  0.000000
7/11/2012	2:20:40 PM	PH3 MFC set to  0.000000
7/11/2012	2:20:40 PM	SiCl4 MFC set to  0.000000
7/11/2012	2:20:40 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	2:20:40 PM	Tube furnace set to 0
7/11/2012	2:20:41 PM	Run finished at 2:20 PM
7/11/2012	2:59:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2012	2:59:23 PM	Recipe started at 2:59 PM
7/11/2012	2:59:23 PM	Helium valve closed
7/11/2012	2:59:23 PM	H2 valve closed
7/11/2012	2:59:23 PM	BCl3 valve closed
7/11/2012	2:59:23 PM	PH3 valve closed
7/11/2012	2:59:23 PM	SiCl4 pre valve closed
7/11/2012	2:59:23 PM	SiCl4 post valve closed
7/11/2012	2:59:23 PM	Main Vac valve closed
7/11/2012	2:59:23 PM	Bypass valve closed
7/11/2012	2:59:23 PM	Bubbler valve closed
7/11/2012	2:59:23 PM	Helium MFC set to  0.000000
7/11/2012	2:59:23 PM	H2 MFC set to  0.000000
7/11/2012	2:59:23 PM	BCl3 MFC set to  0.000000
7/11/2012	2:59:23 PM	PH3 MFC set to  0.000000
7/11/2012	2:59:23 PM	SiCl4 MFC set to  0.000000
7/11/2012	2:59:23 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	2:59:23 PM	Tube furnace set to 0
7/11/2012	2:59:26 PM	H2 valve closed
7/11/2012	2:59:26 PM	BCl3 valve closed
7/11/2012	2:59:26 PM	PH3 valve closed
7/11/2012	2:59:26 PM	SiCl4 pre valve closed
7/11/2012	2:59:26 PM	SiCl4 post valve closed
7/11/2012	2:59:26 PM	Main Vac valve closed
7/11/2012	2:59:26 PM	Bypass valve closed
7/11/2012	2:59:26 PM	Bubbler valve closed
7/11/2012	2:59:26 PM	Helium valve opened
7/11/2012	2:59:26 PM	Helium MFC set to  500.000000
7/11/2012	2:59:26 PM	H2 MFC set to  0.000000
7/11/2012	2:59:26 PM	BCl3 MFC set to  0.000000
7/11/2012	2:59:26 PM	PH3 MFC set to  0.000000
7/11/2012	2:59:26 PM	SiCl4 MFC set to  0.000000
7/11/2012	2:59:26 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	2:59:26 PM	Tube furnace set to 0
7/11/2012	2:59:31 PM	Helium valve closed
7/11/2012	2:59:31 PM	H2 valve closed
7/11/2012	2:59:31 PM	BCl3 valve closed
7/11/2012	2:59:31 PM	PH3 valve closed
7/11/2012	2:59:31 PM	SiCl4 pre valve closed
7/11/2012	2:59:31 PM	SiCl4 post valve closed
7/11/2012	2:59:31 PM	Main Vac valve closed
7/11/2012	2:59:31 PM	Bypass valve closed
7/11/2012	2:59:31 PM	Bubbler valve closed
7/11/2012	2:59:31 PM	Helium MFC set to  0.000000
7/11/2012	2:59:31 PM	H2 MFC set to  0.000000
7/11/2012	2:59:31 PM	BCl3 MFC set to  0.000000
7/11/2012	2:59:31 PM	PH3 MFC set to  0.000000
7/11/2012	2:59:31 PM	SiCl4 MFC set to  0.000000
7/11/2012	2:59:31 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	2:59:31 PM	Tube furnace set to 0
7/11/2012	2:59:32 PM	Run finished at 2:59 PM
7/11/2012	2:59:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/11/2012	3:02:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/11/2012	3:02:15 PM	Recipe started at 3:02 PM
7/11/2012	3:02:15 PM	Helium valve closed
7/11/2012	3:02:15 PM	H2 valve closed
7/11/2012	3:02:15 PM	BCl3 valve closed
7/11/2012	3:02:15 PM	PH3 valve closed
7/11/2012	3:02:15 PM	SiCl4 pre valve closed
7/11/2012	3:02:15 PM	SiCl4 post valve closed
7/11/2012	3:02:15 PM	Main Vac valve closed
7/11/2012	3:02:15 PM	Bubbler valve closed
7/11/2012	3:02:15 PM	Bypass valve opened
7/11/2012	3:02:15 PM	Helium MFC set to  0.000000
7/11/2012	3:02:15 PM	H2 MFC set to  0.000000
7/11/2012	3:02:15 PM	BCl3 MFC set to  0.000000
7/11/2012	3:02:15 PM	PH3 MFC set to  0.000000
7/11/2012	3:02:15 PM	SiCl4 MFC set to  0.000000
7/11/2012	3:02:15 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	3:02:15 PM	Tube furnace set to 0
7/11/2012	3:03:23 PM	Helium valve closed
7/11/2012	3:03:23 PM	H2 valve closed
7/11/2012	3:03:23 PM	BCl3 valve closed
7/11/2012	3:03:23 PM	PH3 valve closed
7/11/2012	3:03:23 PM	SiCl4 pre valve closed
7/11/2012	3:03:23 PM	SiCl4 post valve closed
7/11/2012	3:03:23 PM	Main Vac valve closed
7/11/2012	3:03:23 PM	Bubbler valve closed
7/11/2012	3:03:23 PM	Bypass valve opened
7/11/2012	3:03:23 PM	Helium MFC set to  0.000000
7/11/2012	3:03:23 PM	H2 MFC set to  0.000000
7/11/2012	3:03:23 PM	BCl3 MFC set to  0.000000
7/11/2012	3:03:23 PM	PH3 MFC set to  0.000000
7/11/2012	3:03:23 PM	SiCl4 MFC set to  0.000000
7/11/2012	3:03:23 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	3:03:23 PM	Tube furnace set to 0
7/11/2012	3:04:23 PM	Helium valve closed
7/11/2012	3:04:23 PM	H2 valve closed
7/11/2012	3:04:23 PM	BCl3 valve closed
7/11/2012	3:04:23 PM	PH3 valve closed
7/11/2012	3:04:23 PM	SiCl4 pre valve closed
7/11/2012	3:04:23 PM	SiCl4 post valve closed
7/11/2012	3:04:24 PM	Bypass valve closed
7/11/2012	3:04:24 PM	Bubbler valve closed
7/11/2012	3:04:24 PM	Main Vac valve opened
7/11/2012	3:04:24 PM	Helium MFC set to  0.000000
7/11/2012	3:04:24 PM	H2 MFC set to  0.000000
7/11/2012	3:04:24 PM	BCl3 MFC set to  0.000000
7/11/2012	3:04:24 PM	PH3 MFC set to  0.000000
7/11/2012	3:04:24 PM	SiCl4 MFC set to  0.000000
7/11/2012	3:04:24 PM	Bypass solenoid MFC set to  0.000000
7/11/2012	3:04:24 PM	Tube furnace set to 0
7/11/2012	3:04:25 PM	Run finished at 3:04 PM
7/11/2012	3:04:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
